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If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 3 5 OUT 16 6 8 10 11 MXJ4 2 4.5 3 4 5 13 6 IN 8 9 6 8 11 28 14 OUT 17 20 MXJ6 3 6 4 6 8 21 11 IN 13 15 10 15 20 50 25 30 OUT 35 MXJ8 4 8 8 11 15 38 19 23 IN 26 Note) Theoretical output (N) = Pressure

Doc. no.IZ*-OMX0012-B PRODUCT NAME Ionizer Gun MODEL / Series / Product Number IZG10 1 Doc. no.IZ*-OMX0012-B Contents Safety Instructions . 3 1. How to Order . 9 1-1. Ionizer . 9 1-2. Accessories . 9 1-3. Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4.

Using the Help Files . 3-1 3.1 The F1 Key .3-1 3.2 The Context Help.3-1 3.3 The Help Pull Down Menu.3-1 3.3.1 The Contents Command or Tab. 3-2 3.3.2 The Index Tab . 3-3 3.3.3 The Find Tab. 3-3 3.3.4 Search for Help On . 3-3 3.3.5 How to Use Help . 3-3 3.3.6 About VLS . 3-3 4.

3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note 1) S coupler and fitting are included in the same package.

less 5 to 40mA 5 to 80mA 40mA 80mA or less 3 wire NPN 3 wire PNP 2 wire 2 wire 3 wire NPN 3 wire PNP 24VDC Relay 4V or less 14V or less AC Relay IC circuit, Relay, PLC 0.8V or less (2 color indication) 24VDC (10 to 28VDC) 4V or less 5 to 40mA 2 wire 24VDC Relay, PLC Water resistant Latch type with diagnostic output 26VDC or less 28VDC or less 28VDC or less 28VDC or less 24VDC (10 to 28VDC

Timer) 8 Body Ass'y(Timer) 9 Body Ass'y(Speed) 9 Body Ass'y(Speed) 10 Cassette 10 Cassette 11 Seal NBR 11 Seal NBR 12 Plug Electroless Brass nickel Plated 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

8, @0, @1, @2, @3, @8 Set of left nos. !8, !9, @0, @1, @2, @3, @8 Note) !8 !9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC.

8, @0, @1, @2, @3, @8 Set of left nos. !8, !9, @0, @1, @2, @3, @8 Note) !8 !9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC.

: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR Basic type (Internal absorber type) 20-MSQA High precision

Operating pressure PSI (kgvcrn,) pressure PSI (kgtcm2) X Allowable kinetrc energy in-lbs (kfg4m) 0.13(0.15) [0.17 (0.2] 3.47x10-3(4x10 3) 2.6x10 ,(3x10 ?) 2.17 x l0 3(2.5xt0-3) 8.68 x l0 3(10x10-3) x [ ] : Max. kintic erEfgy for rubber bumpers.

Application 10 3. Specifications 10 4. How to Order 10 5. Operation Patterns 11 6. Characteristics 11 ~ 12 7. Dimensions 13 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

ZL-OM00801 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2010 SMC Corporation All Rights Reserved 31 -

4 6 8 10 SFE1 3 SFE3 30 SFE4 65 SFE5 130 SFE7 200 Hollow fiber membrane The hollow fiber membrane has a porous construction with numerous fine holes on a straw type fiber membrane wall.

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

by scraper (g) Model Model Stroke (mm) Mass (g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 650 10 30 20 MIW20-20D MIW 32 mm 1550 20 30 25 MIW25-25D For MIW, same stroke as bore size 2650 35 100 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D

Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok

If the socket will be used again, first spread the hook outward. 9 VFR2000-OMH0002-A VFR2000 Series 5 Port Solenoid Valve / Specific Product 3 10 Be sure to read before handling.