High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

ZQ-OM01601

(1F.S.) 1 LoC1 ( [LoC]) < -> 5 LoCUnL () ,/ 39 - < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41 -/ [UnL], [FAL]3[LoC] 40 - [000] <> (40 -)(40 -) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) 41 - /ON/OFF OUT2 OUT1 (V) OUT2 OUT1 (V) H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPa H_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 P_1 H_3 100 H_3 42 - , (1015 ) 43 - () No.1 ON ON OFF Yes No No

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.

ZK2-C

38NO.ZK2-OM00801-B [F99] <> [F99] [ON] 5 [oFF] [F99] -39NO.ZK2-OM00801-B / ()/ 1 "Hi" 1 1 "Lo" 1 1 () 3.5%F.S "0" (1F.S.) 1 , [LoC]1 ( [LoC]) < -> 5 LoCUnL () / -40NO.ZK2-OM00801-B < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 42/ [UnL] [FAL] 3[LoC] -41NO.ZK2-OM00801-B [000] <> (41)(43) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -42NO.ZK2-OM00801-B B /ON/OFF H_3 P_1 H_3 100 H_3 P.25F

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

LZ-OM003xx

L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 does not start or operation stops suddenly. Perform inspection before/after operation Note. Refer shorter data from above. Energizing tim e Inspection item What to inspect moving range. Reference of travel depending lead Mounting the body No loose part. Check item What to check Motor If it is too hot.

2-Color Display High Precision

Option Nil M ZS-24-A ZS-24-B ZS-24-D ZS-35-C Fixed SI unit Note 2) Bracket A With 2 mounting screws of each M3 x 5L, M4 x 5L Bracket B With 2 mounting screws M4 x 5L With unit switching function Note 1) P (Initial value psi) Bracket D With 2 mounting screws of each M3 x 5L, M4 x 5L Panel mount adapter (Piping: For 01/N01) Panel mount adapter (Piping: For W1/WF1/M5/C4/C6) Panel mount adapter

Series M Miniature Fittings M3, R(PT) 1/8, M5

M5 female -M5 female M-5L M-5GH M-01H-6 P. 90 6/4 P. 93 P. 92 89 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M3 Barb fitting for soft tube: M-3AU-3 Barb fitting for soft tube: M-3AU-4 Effective orifice: 0.9mm 2 Weight: 0.7g Effective orifice: 0.9mm 2 Weight: 0.6g Barb elbow for soft tube: M-ALU-4 Barb elbow for soft tube: M-3ALU-3 Effective orifice: 0.6mm 2 Weight: 0.8g Effective

Shock Absorbers and Rate Controls

(iltodel) (rtolog l,lo, (lttodel) I ( t) t t( l(r wf wt ryrrl t44 162 58 l3l4-12 l.lN 38 44 TI 5l 't0 LR0EMrAxl 144 162 58 t3la.12 UN l 3 38 44 92 23 5l l0 0t[%r2 195 213 58 l3/+12 UN l 3 38 44 8 23 LR0tIUl316x2 t95 213 58 l314-12 U t3 38 44 | 8 23 2l 5l t2 0t r/x3 216 264 58 Ir7r.12lJti t3 38 44 143 23 2t 5l t 2 LR0E[tl%xl 1 7 5 r93 77 2'lz l2 UN t9 50 57 l t 4 26 26 70 l2 lEfill7sr2 225

IP80-OM00019

./ 80L/min(ANR)(SUP=0.14MPa) *3 200L/min(ANR)(SUP=0.4MPa) 5L/min(ANR)(SUP=0.14MPa) *3 11L/min(ANR)(SUP=0.4MPa) 2080() 2060( ExdBT5) ExdBT5(TC15916) A A Rc1/4 1/4NPT G1/4 Rc1/8 A G1/2M20X1.51/2NPT G1/2 2.6kg 2.4kg JISF8007 IP65(IEC Pub.529) *11/21/2%F.S.

Mechanical Valves Series NVM, NVFM, NVZNI

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

PSE540/560

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Wiring Caution M3 x 5L 1. Connection and removal of sensor connector Hold the lever and connector body with two fingers and insert the connector straight into the pin until it is locked with a click sound.

LZ-OM004xx

Travel km L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 1,700 L[]Z[]3H 1,200 Note. Refer to the shorter data shown above. Energizing tim e Reference of travel depending lead Horizontal direction Reference for energizing tim e Model no. Mount operating conditions. Horizontal Auto switch mount groove Model no. Mounting direction 8.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

IIIIIII

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

VZ1000

Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon