Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None,

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F, Bracket: None,

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: Rc, Port Size: 3/4, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: w/Bracket

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None,

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: w/Bracket,

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None,

MSQ

V Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color display) 3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indication) M9PA M9PAV 3-wire (PNP) M9BA M9BAV 2-wire 12 V Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.

.: 04 (ø4), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller), Indicator: Z (w/Miniature Indicator)

Body Class: 2 (Orifice Dia. ø4), Valve Type: 2 (Double Acting), Applicable Tubing Size: 07 (1/4"), Port B (OUT) Different Dia. Size: 03 (ø3mm or 1/8"), Pilot Port Thread Type: 2 (M5X0.8)

Clean Series: 10 (Clean Room), Stations: 07, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: LQ3 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 24 (Indicator & By-pass)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 2 (ø4 Orifice), Valve Type: 2 (Double Acting), Fitting Size: 07 (1/4"), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 2 (ø4 Orifice), Valve Type: 2 (Double Acting), Fitting Size: 07 (1/4"), Pilot Port Thread: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Size: 07 (1/4"), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 3 (ø8 Orifice), Valve Type: 2 (Double Acting), Fitting Size: 07 (1/4"), Pilot Port Thread: LQ3 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)