Individual, Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Power Saving Circuit, DC Only, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Light/Surge Suppressor: With light/surge voltage suppressor, Manual Override: Push-turn Locking Slotted Type, A, B Port Size: 1/4, Thread: G, Bracket: None, Made to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3

Individual, Low Wattage: None, Pressure Specification: High-pressure, 1MPa, Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: Conduit Terminal, Light/Surge Suppressor: With light/surge voltage suppressor, Manual Override: Push-turn Locking Slotted Type, A, B Port Size: 1/4, Thread: NPTF, Bracket: None, Made to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3

Resistant / Heat Resistant, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M3, Buffer specifications: -, Buffer stroke(mm): -, Mounting connection screw: Male thread M6 × 0.75, Type: With adapter, Vacuum outlet direction: Vertical direction, Barbed fitting tube diameter(ø): -

Shape: [Other Shape] Flat Type, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard / Oil Resistant, Vacuum Outlet Port: One-Touch Couplings, Pad diameter(ø): 1.5, Vacuum entry port thread diameter: ø2, Buffer specifications: -, Buffer stroke(mm): -, Mounting connection screw: Female thread M3

, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 304, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: M3

, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 304, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): 6, Applicable Tube O.D. inch size(inch): -, Body Size: M3

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Note 1) For bore sizes ø6 and ø10, the piping port size has been changed from M5 to M3.
Note 2) The “-X1666” suffixed special order product is not available for ø10 or ø16 CDJ2D(T) series built-in magnet type cylinders.

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 female -M3 male M-3UL For soft nylon tube. Barb elbow P. 92 3.18/2.18 Body rotates at 360 around the stud axis. Nipple M-5ALU-3 Fitting to workpiece and fitting to fitting connection. P. 90 For polyurethane tube. 3.18/2 M3 Universal tee M5 male -M5 male M-5N Body rotates at 360 around the stud axis. M3 female -M3 female -M3 male For soft nylon and polyurethane tube.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.