CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Program Top entry Side entry U S * For "C" type manifolds only * For "C" type manifolds only * For use with 24VDC valves only.

MICRO MIST SEPARATOR

AF-OMR0021-C PRODUCT NAME MICRO MIST SEPARATOR MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

ZCUK

Number of auto switches Without auto switch C 16 ZCUK D 20 S 1 pc. C S D 16 D 20 ZC UK M9B With auto switch Auto switch Built-in magnet Nil Without auto switch Style (Tubing method in vacuum side)/ (Rod end shape) Refer to the table below for applicable auto switches.

VHK

D.

VHK

D.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

MHS

O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Series VS

Pilot valve assembly SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 6 9 Series VS R8b S VALVES A A F B C B C D D 14 14 14 SMC SMC SMC 12 12 SMC 12 MANUAL MANUAL INDICATOR INDICATOR MANUAL MANUAL INDICATOR INDICATOR OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

NVEPA|VEFseies

Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Compact Manifold Regulator

C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Economy Valve

Lead wire color (grommet) Voltage Color SOL 100 VAC Blue Cylinder Xa Xb Xc Yb Ya Mode 200 VAC Red Upward High speed a DC Red (+), Black () Low speed b Downward High speed c How to use the needle Low speed d Rotate the needle clockwise to close, and counterclockwise to open.

IDX-OM-W037

Carry out checks to confirm there is no air leakage. 1 1 Cap bolt OUT IN 4 4 3 3 2 2 5 5 6 No Part name Part number IDH4 IDH6 1 Body 2 Element Element assembly AMHEL350 3 Gasket Element assembly AMH-EL250 4 O ring 5 Housing Case assembly AM-CA250C-D [For Option E] AM-CA250C-C Case assembly AM-CA350C-D [For Option E] AM-CA350C-C 6 Auto drain (2) Super mist separator element replacement procedure