Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: Y (w/o Operation

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3 (Bracket C)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

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~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1.. I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm.

Body Size: 25, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: NY (N + Y)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: BM (B + M), Semi-Standard: Y (Knob, Upward)

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads "FILTER/REGULATOR. Y.

Piping: NPT1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function, Not Allowed for Use in Japan, Option 1: Bracket A, Option 2: Y

Piping: NPT1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function, Not Allowed for Use in Japan, Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function (Not Allowed for Use in Japan), Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: M [Fixed to SI Unit (kPa, MPa)], Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function, Not Allowed for Use in Japan, Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function, Not Allowed for Use in Japan, Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: w/Unit Conversion Function (Not Allowed for Use in Japan), Option 1: None, Option 2: Y