Electric Actuator

1500) Horizontal 66 (30) 121 (55) 99 (45) 187 (85) Work load lb [kg] Note 2) Vertical 11 (5) 22 (10) 22 (10) 44 (20) Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 Stroke Speed Note 3) [mm/s] Actuator specifications Electric 901 to 1000 390 190 600 300 range AC Servo Motor Specific Product 1001 to 1100

CG5-S

Improved sealing Models and Specifications Note 1) Pneumatic cylinder Hydraulic cylinder Operating pressure Ambient temperature Applicable cylinder nominal thread size Allowable eccentricity U Max. tension and compression N 80 210 1100 2500 6000 11000 Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Model M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5

Table of Contents

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

1.1

242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001/002/005 No.

HRX-OM-M090

refrigerated type type type type type type Refrigerant R407C(HFC) Quantity of refrigerant kg 0.35 0.3 0.36 0.31 0.36 0.31 Control method PID control Ambient temperature and humidity2 Temperature: 5 to 40oC18 Humidity: 30 to 70% Circulating fluid3 Tap water, Ethylene glycol aqueous solution 15%5 Operating temperature oC 5 to 40 range2 Circulating fluid system Cooling capacity4 (50/60Hz) W 1100

Refrigerated Air Dryers Series IDF/IDU

11.5 8.7 4.1 5.9 50 Hz 13.0 10.2 4.5 6.4 60 Hz Inlet air pressure 0.7 (MPa) Inlet air temperature 55 (C) Ambient temperature 32 (C) 10 Outlet air pressure dew point (C) Power supply voltage (frequency) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power consumption (W) 50/60 Hz Operating current (A) 50/60 Hz Applicable circuit breaker capacity Note 4) 1530/2000 2200/2850 1100

Basic type / Direct mount type Series CY3B/CY3R

Caution Symbol Specifications Theoretical Cylinder Thrust Head resistant cylinder (10 to 150C) XB6 XB9 Low-speed cylinder (15 to 50mm/s) 6, 10 15, 20, 25, 32, 40 XB11 Long stroke type XB13 Low-speed cylinder (7 to 50mm/s) 1200 100 XC24 With magnetic shielding plate 40 40 1100 90 XC57 With floating joint 1000 900 Bore size 10 Bore size 10 Theoretical thrust (N) Theoretical thrust (N) 80 X116

High-precision Digital Pressure Switch ( compatible)

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -68No.PS-OMV0004-H Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

Digital Pressure Switch ( compatible)

. (-50 ~ 50) 0.1% increments 0x0424 (1060) 0 R/W N S16 0x0 (0) 0: Std 1: dUAL (2 value display) 2: o1Lv (OUT1 level bar) 3: o2Lv (OUT2 level bar) 4: LinE (Line name) 5: oFF (No display) Setting of lower level screen 0x044C (1100) 0 R/W Y U8 0 During Std setting Selection of display item Y U8 0 Refer to Table "selection of display items during std setting". 0x044D (1101) 0 R/W Lower level

High-precision Digital Pressure Switch

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -72No.PS-OMV0009-E Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

C85

(100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100

Digital Pressure Switch ( compatible)

. (-50 ~ 50) 0.1% increments 0x0424 (1060) 0 R/W N S16 0x0 (0) 0: Std 1: dUAL (2 value display) 2: o1Lv (OUT1 level bar) 3: o2Lv (OUT2 level bar) 4: LinE (Line name) 5: oFF (No display) Setting of lower level screen 0x044C (1100) 0 R/W Y U8 0 During Std setting Selection of display item Y U8 0 Refer to Table "selection of display items during std setting".

High-precision Digital Pressure Switch ( compatible)

adjustment ratio) Displayed pressure value can be adjusted within 5%R.D. 0.1% increments S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -69No.PS-OMY0007-A Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

e

Controller (51.8) 15.5 87.3 Motor position T With floating bracket (2 x M5 x 0.8 thread depth from bottom of counterbore 7.5) 2 x 10 counterbore depth 2 I/O cable Note) Slot for auto switch 32.5 Power supply cable (2 wires) 80 20 160 + Stroke (500) 60 Motor position D Note) For the 3-point stoppable type, the I/O cable is a 9-core type and for the 5-point stoppable type, a 11-core type is used. 1100

AC Servo Motor Driver (Pulse input type/Positioning type)

If you want to the SON and MD0 to automatic ON Binary number (BIN) "0101" to Hexadecimal (HEX) "5" If you want to the EM1 to automatic ON Binary number (BIN) "0010" to Hexadecimal (HEX) "2" If you want to the LSP and LSN to automatic ON Binary number (BIN) "1100" to Hexadecimal (HEX) "C" 40 - * Enabling Stroke end (LSP, LSN) , Forced stop (EM1) and Servo-on (SON) Signals Set to PD01 to 0C24

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Mechanically Jointed Rodless Cylinders

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 120 120 100 100 m MY3A63 (1900) MY3B63 (1800) 80 80 Weight W (kg) Weight W (kg) l 60 60 MY3A50 (1650) MY3B50 (1650) MY3A40 MY3B40 (1300) (1400) 40 40 m l MY3A32 MY3B32 (1200) (1250) 20 20 MY3A25 MY3B25 (1100) (1000) m (1050) MY3A20 (1000) MY3B20 MY3A16 MY3B16 (1000) (900) 0 0 0 500 1000 1500 2000 2500 3000 0 500 1000 1500

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% AS2201F -01-08 AS2200-01 SV 200 SYJ 100 70% 50% 30% 10% SZ 0 400 MB 40 VP4 300 AS2201F -02-08 AS2200-02 S0700 200 VQ 100 VQ4 0 SV200 ANA1 -C10 T0806 VQ5 400 MB 50 300 VQC AS3201F -02-08 AS3000-02 200 VQZ 100 SQ 0 VFS MB 63 400 VFR 300 VQ7 AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200