Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

Electric Actuators

Limit switch 10 20 30 None B contact specification 2 pcs.

Hydraulic

Made to Order Modification of Rod End Configuration 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end configuration pattern symbol A1 A2 A3 CO.5 30 30 30 30 D D D d d Width across flats F F F A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F Note) Female thread effective depth should

Table of Contents

Limit switch 10 20 30 None B contact specification 2 pcs.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CRB2/CRBU2/CRB1

46.5 30 50 60 46.5 60 50 30 30 30 203 47 90 150 203 150 90 47 30 3 Series CRB2 A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

46.5 30 50 60 46.5 30 30 50 60 Angle adjuster 30 203 47 90 150 203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Smooth Cylinder/Low Speed Cylinder

30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5

CATALOG VC10

70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB

TABLE OF CONTENTS

70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Auto Switch Guide

-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Rotary Actuator/Vane Type

to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.