EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.68285 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

Type: 41 (Feedback Sensor Type), Bar Length: 1300mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø6, Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 820mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 580mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø8, Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 1120mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø10, Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 340mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø10, Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 1300mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø10, Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 580mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: Z (10m), One-Touch Fitting: ø10, Bracket: B (Bracket)

Model: 41 (AC), Bar Length: 58 (580mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: N (None)

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

Large Capacity Compressed Air Filters Series AFW

. ** 32 41 12 20.5 6,460 AFW3800-N60FM-WS 3,800 3/4 3/4 647 8 flg. ** 32 41.5 14.5 24 11,050 AFW6500-N80FM-WS 6,500 3/4 3/4 778 10 flg. ** 32 42.5 17.5 28 17,000 AFW10-N100FM-WS 10,000 CF CF CF 12 flg. ** CF CF CF CF 28,050 AFW16500-N120FM-WS 16,500 * Bottom drain, with mechanical float drain ** ANSI 150# type Threaded water separators are standard with auto drain valves, flanged units with

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2

Series NCA1

/Single Rod XC22 Viton Seals XC35 With Coil Scraper X46US Special Trunnion Location X119US Non-Rotating Oversize Rod Auto Switch Standard With Auto Switch (Magnetic Piston) Nil D Model Standard Cylinder Non-Rotating Cylinder Double Rod Male Rod Stud Nil K W M X130US Stainless Steel Piston Rod, Tie Rod, Tie Rod Nut, Cushion Valve Needle For special rod end modifications please see page 41

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 100.00000 lb. VVD.

2-Color Display Digital Flow Switch Series PFM

DC () IN Pin no. 1 2 3 4 1 to 5 V or 4 to 20 mA With bracket A 30 20 46 4.2 10 PFM 15 PFMV 40 31.5 26.5 7.2 PF2A 1.6 22 PF2W 35 41 PF2D View A Bracket IF With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 11 34.5 24 7 Panel thickness dimension: 0.5 to 6 Panel mount adapter + Front protective cover 8.75 Panel mount adapter 937 Series PFM3 Dimensions Panel

Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)

VM

Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet Function 5-6-2 Mechanical Valves Series VM Mechanical Valves SA VA VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM VR VH VHS Roller lever Adjustable roller lever Adjustable rod lever P . 5-6-41

Hand Valve Series VH

(A) SA 49 4-5.5 4-6.6 VA 62 VM 134(159) VR 97(122) VH 125 94 VHS M40 x 1.5 8 (10) 1.5 M8 x 1.25 106(113) M33 x 1.5 8 45 1.5 M8 x 1.25 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc 1/4 VH33-02/03 (Bottom ported) 2 (A) 44 Panel cut dimension 2-A +0.3 0 1 (P) 3 (R) C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41

Drain Separator for Vacuum Series AMJ

ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (171) 14 53 16 41

Micro Mist Separator Series AFD20/30/40

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22 23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70