CXT With 1 shock absorber (Set on the driving cylinder side when packed.) 25 B 32 BS 40 Standard stroke Long stroke For minimum strokes for auto switch equipped style, refer to page 8-27-12. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
18 1500 IZS30-1900** 23 1900 End bracket (IZS30-BE) Intermediate bracket } gMi dQ j Thread for mounting M5 (Should be prepared by user) Attached thread M4X10L dQho g)iSu Angle ajustment available (90) } IZS30-BM ~ ~ }} ~~ )h dl g0i dQ j Thread for mounting M5 (Should be prepared by user) Angle ajustment available (90) Surface electric potential sensor (IZS30-D1) Sensor bracket (IZS30-BS
May S AS BS CS DS ES FS . Caution If instructions are not followed there is a possibility of injury or equipment damage. Jun T AT BT CT DT ET FT . When dispose the product, contact an industrial waste disposal company for disposal of the product. To minimize the risk, drain the fluid from the product when it is scrapped.
SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.
BS For minimum strokes for auto switch equipped style, refer to page 530. Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Auto switch part no.
BS Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
Nil B BS With shock absorber (1pc. on port side) The adjustment bolt is installed even when B or BS is selected. (except for 10) Refer to "Auto Switch Guide" (E274-A) for further details on auto switch units. Refer to pages 60 and 61 for auto switch circuit diagrams. Applicable auto switch types Lead wire length (m) Note 1) Load voltage Electrical entry direction Auto switch no.
SD RD 24V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24V 0V 24V 0V +24V 24G DA DB DG FG LED name LED name LED name PWR Content Content Content Green light turns on when line power is input Turns on during supply of communication power, turns off when there is no input Turns on during supply of communication power, turns off when there is no input PWR PWR Light off: When unit is off-line or power
Single acting nomally open: O.D. holding force, Single acting nomally closed: I.D. holding force Refer to "Effective Holding Force" for the holding force at each holding position, page 13 to 17. 11 Series MHK2 Wedge Cam Operation Gripper Construction Double acting Single acting ck 3 bs br 2 9 Open finger Normally open bt 5 6 bp 8 7 bq 1 4 bl bk bm Closed finger Normally closed bo bn Parts
ZS AS BS . Likewise, if a tube is bent or multiple elbow fittings are used, the piping Output shut off alarm function Jun T TT UT VT . ZT AT BT . resistance will increase and the flow rate will decrease. If the flow rate falls, the temperature stability will decrease.
If a stop valve or a silencer is connected to the exhaust port of VHS20/30, the effective sectional area should be larger than the figure indicated in the following table, to prevent malfunction caused by back pressure.
+ BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD terminal.
Stick terminal: Size 1.5 or shorter (Example) 2000 mm lead wire length DC AC VP342-5LO1-01A VP342-1LO1-01A V200-30-4A-20 V200-30-1A-20 Ground nut Set screw Tightening torque Tightening torque 0.5 to 0.6 Nm 2.5 to 3.75 Nm Washer Housing Grommet (Rubber) Terminal block Terminal screw 3 locations Tightening torque 0.4 to 0.5 Nm + (Location for light mounting) (Polarity indication) (Voltage
22.8 0.49 6.3 P2 (Port size) EXH Model P1 P2 A B C D Applicable size VHS20-D 1/8, 1/4 1/8 48.5 23 40 37 AC20-D VHS30-D 1/4, 3/8 1/4 55 32 53 49 AC30-D VHS40-D 1/4, 3/8, 1/2 3/8 69.7 41.3 70 63 AC40-D VHS40-06-D 3/4 1/2 71.7 43.3 75 63 AC40-06-D VHS50-D 3/4, 1 1/2 86.5 44.5 90 80 AC50-D/AC60-D Model E F G H Applicable size VHS20-D 28 42 17.5 40 AC20-D VHS30-D 38 53 20 53 AC30-D VHS40-D 52
BS+ 0V 24V FG BSBDH 108.5 (Single) 113.1 (Double) 122 (3 position) ERR. PWR. BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.
ZS AS BS . This function raises an alarm when temperature of the circulating fluid is out of allowable upper and lower range. When the alarm is raised, WRN is indicated on LCD. If circulating fluid temperature returns to within allowable upper/ lower range, this alarm is automatically cancelled. The allowable upper and lower range of temperature can be set between 0.1 and 10 C.
With 1 shock absorber (Set on the driving cylinder side when packed.) 25 B 32 BS 40 Standard stroke Long stroke * Refer to p.3.8-10 for minimum strokes for auto switch equipped style. Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.
V0V CANL FG CANH V+ 24V V0V CANL FG CANH V+ BDH BS+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA End resistance End resistance Master Connector with end resistance VSLD FG FG FG BDH CANL BDL FG CANH Type 3 grounding Type 3 grounding Type 3 grounding V+ Branching crimp connectors Twisted pair line with shielding DeviceNet CompoBus/S System
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.