AWM20 to AWM40

D-DN This catalog is printed on recycled paper with concern for the global environment.

Low Profile Slide Table Series MXF

H G 4H9 depth 4 +0.030 0 27.5 5 4H9 +0.030 0 depth 4 (mm) DN G H NN I J M Z ZZ Model MXF16-30 4 29 25 4 12 50 83 83 94 -X MXF16-50 6 29 55 4 12 80 113 113 124 MXF16-75 6 39 45 6 13 125 159 159 170 Individual -X 143 Series MXF Dimensions: MXF20 Stroke adjuster at retraction end Stroke adjuster at extension end Width across hexagon socket hole 4 Width across flats 12 Blanking plug (M-5P 2 points

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

When both options are specified, indicate as DN.

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

No more element replacement!

D-DN This catalog is printed on recycled paper with concern for the global environment.

9.8

D-DN

EX500

0 Power cable with connector (for power block) o Cable with connector for output entry y Waterproof cap (for socket) EX r Terminal plug t Waterproof cap (for plug) 1689 Series EX500 Options q Cable with communication connector w Cable with M12 connector 030 SSPS EX500 AC For DeviceNet type GW unit 050 EX500 AC DN Cable length (l) 003 005 010 030 050 300 [mm] 500 [mm] 1000 [mm] 3000 [mm] 5000

VR4151/4152

D-DN This catalog is printed on recycled paper with concern for the global environment.

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

Vacuum Regulator

D-DN

IDX-OM-N030

(On the opposite side) (The opposite side Compressed Air outlet DN Flange 80/PN16 Drain tube Ventilation direction direction Drain tube Ventilation Ventilation 20 268 720 217 A A 4x 20 8x 18 Drawing of view A Flange bolt hole 1300 DN Flange 80/PN16 1290 9351 160 20 64 75 Compressed Air inlet direction direction Ventilation 17 or less) (Electric wire diameter Signal cable outlet (with Dust-protecting

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

DN Manifold Caution A B A B VVQ2000FPG 06 PSince air Ieakage from the pipe between the valve and cylinder or the fittings will prevent the cylinder from stopping for a long time. Check for air leakage using neutral household detergent, such as dish washing soap. Also check the cylinders tube gasket, piston seal and rod seal for leakage.

2–4

Printed in Japan. 1st printing September, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Compact Type

Printed in Japan. 1st printing June, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.