Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31
20 Guide tube fitting Aluminum alloy Chromated 21 Pipe Stainless steel 22 Hexagon socket head cap screw Alloy steel Zinc chromated 23 Hexagon socket head cap screw Alloy steel Zinc chromated 24 Spring washer Alloy steel Zinc chromated 25 O-ring NBR 26 O-ring NBR 27 M5 plug 28 Metering valve with silencer ASN2-l 29 Solenoid valve 30 Sub-plate (Left cover side) Aluminum alloy Chromated 31
Compact type CXSJ 2122CXSJ/ 1112Dimensions / 6 10 9+ST 4-M3 x 0.5 thread depth 3.5 8 2.7 6.7 2-M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31
, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31
(Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31
D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31
VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Mounting bolt and gasket are not included. Thread type Nil N T F Rc NPT NPTF G 3 position exhaust center 3 position closed center Caution Be sure to read this before handling.
Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31
Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31
Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.
S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension
Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX 73 90 110 FZ 93 114 138 A 221 243.5 299.5 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 L 45 54 56 N 9 11 13 O QB 7 8.5 10 B 93 99 128 QA 10 12.5 12.5 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31
RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications (For details, refer to page 8-31-1.)
E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31
tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25 1.5 2 2.5 2.5 51 62.5 80.5 101 129 8.5 10 16 21 18 13 15 18 24 38 11 13 20 26 22 31
.: GR-S-010 (10 g), GR-S-020 (20 g) 31
SI Unit: AS-i, 8 In/8 Out, 31 Slave, 1 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -