Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth

C85

(mm) M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 M4 x 0.7 Piston rod thread Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Male Thread Adapter: Vacuum Inlet Lateral Pad form Flat type with groove ZP3E-Y32UMl-AL14 ZP3E-Y40UMl-AL14 ZP3E-Y50UMl-AL14 Width across flats 19 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 M14 x 1 A-A A-A A-A M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 22 22 22 5 5 5 5 5 5 57.6

C85

(mm) M10 x 1.25 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M4 x 0.7 Piston rod thread Port size G 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod

Large Size Vacuum Module: Series ZR

Ejector unit (600) 80 Release pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/8 7.5 7.5

Made to Order

M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 94 M5 x 0.8 M5 x 0.8 109 M5 x 0.8 M5 x 0.8 20, 30, 40, 50, 75, 100, 125, 150 175, 200, 250, 300, 350, 400 109.5 M6 x 1.0 M6 x 1.0 135.5 M8 x 1.25 M8 x 1.25 25, 50, 75,

1

U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

KA

<M5, M6> <M5, M6> A D2 M L1 L2 D1 Part No.

Rotary Table/Rack & Pinion Style Series MSQ

x 0.8 7.5 2.5 6 4 5.5 3 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 4.5 M5 x 0.8 M5 x 0.8 7.5 2.5 6 5 5.5 7 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 4.5 (mm) JK P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 L2 M A D1 D2 L1 Part No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

x 0.8 thread depth 8 2-M6 x 1.0 (Through-hole) 4-M5 x 0.8 thread depth 7.5 30 (Z) 19 11.5 T 9 20 2-M5 x 0.8 thread depth 8 2-M8 x 1.25 thread depth 12 (30) (Z) 8 75 0.2 16 (mm) S SS ZZ Z Part no.

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

unused M5 port.

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 12 12.5 5.5 12 6.3 26 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 804 MXQ 1322Air Slide Table Basic Dimensions: MXQ8 13222 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 2 7 3.5 I J Vacuum suction port M5 x 0.8 8 Max. 11 (Retraction end adjuster) 5.5 4 6.5 Note 1) If long bolts are used, they can touch the