Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

Series SV

0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

PFxx-OMY0005

(Window comparator) 1250 0x04E2 1ot (Selection of output type) Setting of OUT1 output normal and reserved output U8 0 Y 0: 1_P (Normal output) 1: 1_n (Reverse output) 2 R/W P_1 (n_1) (Selection of output set value) Setting range 0xFFCE to 0x041A (-50 to 1050) Setting of OUT1 output set value (Hysteresis) S16 500 Y 1 R/W H_1 (Setting of OUT1 hysteresis) Setting range 0x0 to 0x044C (0 to 1100

4-channel Flow Monitor ( compatible)

Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0 to 50.0 0.0 to 52.5 50 L Flow gal/min 0.00 to 1.76 0.00 to 1.86 PD 0 to 1000 0

Programless controller Step motor (servo 24 VDC)

1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

CHKD/CHKG

8078 50 414 551 902 1224 1731 2754 4846 8320 75 1117 1499 2101 3299 5661 9530 100 1332 1774 2471 3844 6476 10740 Unit: g CHKDL/Foot type Bore size (mm) Standard stroke (mm) 5 10 15 20 25 30 35 40 45 50 75 100 20 25 32 40 50 63 80 100 1505 2195 3310 5475 9150 14930 560 690 1060 1610 2515 4310 7410 12375 465 570 880 1375 2200 3845 6555 11355 490 600 925 1435 2280 3960 6725 11610 580 720 1100

IDX-OM-N030

Reference Model Item IDFA100F-40IDFA125F-40IDFA150F-40Fluid Compressed air Operating Inlet air temperature oC 5 to 60 range Inlet air pressure MPa 0.15 to 1.0 / 0.15 to 1.6 for option K Ambient temperature (humidity) oC 2 to 45 (Relative humidity 85% or less) Air flow Standard conditions (ANR) Note 1) 860 1100 1340 capacity Air compressor suction condition Note 2) 875 1119 1363 m3/h Rated

EXxx-OMK0006

Object Function Code Resulting COB-ID Communication Parameters at Index NMT 0 0 SYNC 0001 128 (80h) 1005h Emergency 0001 129 (81h) to 255 (FFh) 1014h PDO(tx) 0011 385 (181h) to 511 (1FFh) 1800h PDO(rx) 0100 513 (201h) to 639 (27Fh) 1400h SDO(tx) 1011 1409 (581h) to 1535 (5FFh) 1200h SDO(rx) 1100 1537 (601h) to 1663 (67Fh) 1200h NMT Error Control 1110 1793 (701h) to 1919 (77Fh) 100Ch,100Dh

LEJ-OM002xx

300,400,500,600,700,800 900,1000,1200,1500 Work load [kg] Note2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100

Table of Contents

Support brackets are not for mounting; use them solely for providing support. m 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 30 (1000) (1000) (1000) (1000) MY1M20 MY1M20 MY1M20 MY1M20 MY1M20

Compact Rotary Actuator Series CRQ2

Mass (g) Size Standard mass 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Not including the mass of auto switch. D319 Series CRQ2X Rotation Range When pressurized from the port indicated by the arrow, the shaft will rotate in a clockwise direction.

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

AC Servo Motor Driver (Pulse input type)

If you want to the SON to automatic ON Binary number (BIN) "0100" to Hexadecimal (HEX) "4" Binary number (BIN) "0" to Hexadecimal (HEX) "0" If you want to the LSP and LSN to automatic ON Binary number (BIN) "1100" to Hexadecimal (HEX) "C" Ex) LSP, LSN and SON to be automatically turned ON, [PD01] = 0C04 38 - * Enabling Stroke end (LSP, LSN) and Servo-on (SON) Signals Set to PD01 to 0C04

IDX-OM-W028

Temperature 32 Pressurized Dew Point 10 Working Fluid Compressed Air Operating Range Inlet Air Temperature 580 Inlet Air Pressure MPa 0.151.0 Ambient Temperature 240 (Relative Humidity of 85% or less) Power source (Note 4) Phase Three Electrical Specification Voltage V AC200(50Hz) / AC200,220(60Hz) Operating current(Note 2) A 4.2 / 4.8 6.7 / 7.3 8.2 / 9.3 Power consumption(Note 2) W 1100

IDU/IDF

50Hz 200AVC 60Hz 5.9 3.1 5.0 7.6 9.5 Power consumption (kw) Auto drain 2.1 3.3 380AVC 50Hz 2.2 3.4 415AVC 50 30 50 60 80 200AVC Circuit breaker (A) 380AVC 15 20 451AVC Water cooled Air cooled Condenser Refrigerant R22 R407C Air connection 6B flange 2 1/2B flange 3B flange 4B flange Drain connection (Rc) Rc 3/8 Rc 1/2 Auto drain ADH4000-04 ADM200-042-8 Weight (kg) 330 350 450 660 1100

2

1100 Bowl material [AF/AFM] Polycarbonate Bowl guard [AF/AFM] Semi-standard (Steel) Standard (Polycarbonate) Construction [AR] Relieving type Weight (kg) 0.39 0.67 0.82 1.53 1.66 Note 1) Conditions: Mist separator inlet pressure: 0.7 MPa; The rated flow varies depending on the inlet pressure.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid 1.5 MPa Proof pressure Maximum operating pressure 1.0 MPa 0.05 MPa Minimum operating pressure Set pressure range 0.05 to 0.85 MPa (2) 1100 Rated flow (/min (ANR)) 1100 450 200 450 Set pressure + 0.05

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

C76

can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100