IDX-OM-P023E

port size 1 1/4 union Power supply voltage (frequency) Note 4) Three-phase AC200V (50Hz) / AC200,220V (60Hz) characteristic Electric Power consumption (50/60Hz) Note 5) k W 11.6 Running current Note 5) A 36.5 Applicable ground fault circuit interrupter capacity (Sensitivity current: 30mA) Note 6) A 50 Refrigerant R407C (HFC) Condenser Water-cooled Port size 6B JIS 10K FF flange Weight kg 1100

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor output [W]/Size [mm] 750/80 Motor type AC servo motor200 VAC Encoder Absolute 22-bit encoderResolution4194304 p/rev Horizontal 135 Power consumption [W] *7 Vertical 150 Horizontal 15 Stnadby power consumption when operating [W] *8 Vertical 45 power [W] *9 Max.1100 Type *10 Non-magnetizing lock specifications 24 VDC Rated voltage [V] Power consumption at at20 [W] *11 Holding force [N

IZx-OMT0049

50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 effect before installing. 3-1-5.

Step Motor Driver （ Pulse input type ）

LEFS25 LEFS32 LEFS40 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 No. 0 0 0 0 Movement MOD ABS ABS ABS ABS to 500 500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550 330 180 750 500 250 500 500 250 801-900 610 410 200 500 500 250 901-1000 500 340 170 500 500 250 Step data default 1001-1100

Best Pneumatics Vol. 14

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid 1.5 MPa Proof pressure Maximum operating pressure 1.0 MPa 0.05 MPa Minimum operating pressure Set pressure range 0.05 to 0.85 MPa (2) 1100 Rated flow (/min (ANR)) 1100 450 200 450 Set pressure + 0.05

OMU0023

Modbus RTU protocol (Hexadecimal notation) Request data 01 08 0 1234 ED7C Response data (normal response) 01 08 0 1234 ED7C (Binary notation) Response data 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 Response data (normal response) 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 For correspondence between ASCII notation and ASCII hexadecimal notation, refer to the 8.4 ASCII

25

silicon 100 m/s2 Ambient and fluid temperature Ambient humidity Material Impact resistance Standards/Directive CE (EMC Directive: 2004/108/EC) Note) When the air purge is performed between a charged object and an ionizer at a distance of 300 mm Number of emitter cartridges/Bar weight 340 5 590 740 860 Bar length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100

3

Max. operating pressure differential Note 3) (MPa) Flow rate characteristics Max. system pressure Note 3) (MPa) Weight Note 2) (g) AC DC Kv Cv Body material Size Port size (Nominal diameter) Orifice diameter (mm) Model Min. operating pressure differential Note 1) (MPa) VXH 2.1 2.4 3 1/4 (8A) 10 VXS235 600 3/8 (10A) 2.4 2.8 4 1/2 (15A) 15 VXS245 4.6 5.3 720 5 3/4 (20A) 20 VXS255 7.9 9.2 1100

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Standard Combinations

40C JIS Symbol ACG40C ACG20C Air filter Lubricator Regulator Standard Specifications ACG20C ACG30C ACG40C Model AF40 AFM40 ARG40 AF30 AFM30 ARG30 AF20 AFM20 ARG20 Air filter Component Mist separator Regulator 1/4 3/8 1/2 1/8 1/4 1/4 3/8 Port size Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa Rated flow (l/min (ANR)) 450 200 1100

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Mechanically Jointed Rodless Cylinder Series MY1

) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

MY1

Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 2.

JXCx-OMU0026

1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 30 20 10 Min. speed [mm/s] (Speed tuning control) 49 33 17 -112No.

Refrigerated Air Dryers

Compressor intake Rated conditions *4 60 Hz 4.6 6.5 10.4 13.3 Inlet air pressure [MPa] 0.7 Refrigerant R407C (HFC) IDF E Inlet air temperature [C] 55 Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Single-phase: 230 VAC 10% (50 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power supply voltage (Frequency) Power consumption [W] 50/60 Hz *5 Three-phase 200 V 1100

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100

CRQ2

With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed