0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Pressure Relief 3 Port Valve With Locking Holes

44 63 43 5.5 26 10 4.2 VHS5510 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510

EX510-GDN1.eng

The setting when shipped from plant is turned OFF, set to HW mode. 1 (No.1) 2 (No.2) 4 (No.3) 8 (No.4) 16 (No.5) 32 (No.6) MAC ID 0 OFF OFF OFF OFF OFF OFF No.10 Function Mode 1 ON OFF OFF OFF OFF OFF HW OFF Set MAC ID and baud rate with SW1 to 8. 2 3 OFF ON OFF OFF OFF OFF SW MAC ID and baud rate are set by network. : SW1 to 8 are ignored.

Metal One-touch Fittings

Safety instructions 2 to 3 2. Specific product precautions 4 to 9 3. Specifications 10 to 11 4. Troubleshooting 11 5. Construction 12 -1- Metal One-touch Fittings Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Solid State Auto Switch

D-M9NW D-M9NWV D-M9PW D-M9PWV D-M9BW D-M9BWV Wiring 3-wire 2-wire Output NPN PNP Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Applicable load IC circuit/Relay/PLC 24 VDC Relay/PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40

IZT40/41/42

2 y One-touch fitting q Model o Power supply cable length Symbol Model 40 Standard type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Length [m] 3 3 5 5 10 10 15 15 N None w Model Symbol Model 41 AC type 42 Dual AC type To use AC adapter, specify N, and select AC adapter sold separately. e Bar length !

Air Suction Filter With One-touch Fittings Series ZFB 1

. 4.76 6.35 9.53 12.7 4.76 6.35 9.53 12.7 Bore size 2.5 4 5 6 6.5 7.5 Bore size 3.48 4.57 6.99 9.56 3.18 4.23 6.35 8.46 BU Blue 3 16 " " Polyurethane Y Yellow 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only. 13-10-6

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

Ｖ cylinder

Fig 3. Order for tightening mounting screws 12 3. Maintenance 3-1.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Multistage Ejector

They depend on atmospheric pressure (weather, altitude, etc.) and the measurement method. *2 10 to 500 Hz for 2 hours in each direction of X, Y, and Z (De-energized, Initial value) *3 3 times in each direction of X, Y, and Z (De-energized, Initial value) Weight Supply Valve/Release Valve Specifications *1 Based on JIS B 8419: 2010 dynamic performance test (Standard type: Coil temperature

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

XL-OMV0005

Refer to Chapter 3 3-2. Step 2 (P9) for size. Torque wrench Refer to Chapter 3 3-3. Step 4 (P10) for size and torque. Tweezers or thin and pointed tool Used for removing and mounting the O-ring. Refer to Chapter 3 3-2. and 3-3 Step 3 (P9, 10). Air facility for valve drive For opening and closing the valve. Table 6.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

End Lock Cylinder Series CBJ2

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

VFRA3000

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

VXA21/22

4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.