Cylinder with Lock Series MNB

L (Ex.) A53L 5m . Z (Ex.)

MXS Series Air Slide Table

Note2) Functional options are not available for MXS L.

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

NCQ8

L M9NL 197in (5 m) .

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

CS1

A1 E1 L1 MM NX d (Drill through) Part No.

MXF

Top Mounting Fixing bolt for guide L Positioning L Caution 1. The positioning hole on the table and on the bottom of the body does not have the same center. Positioning hole is meant to be for reproducibility for mounting and dismounting.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no. Applicable bore size Dd9 d L L1 m t Included retaining ring Part no.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed switch) D-M9 (Solid state switch) D-M9 Specific product precautions Be sure to read before handling.

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

EX260-SEN_eng

Designation Description Fieldbus interface connector (BUS IN) EtherNet/IPTM connection PORT 1 (M12 4-pin socket, D-coded) 4 2 SI24 V +24 V for SI unit operation 2 1 SV24 V +24 V for solenoid valve 2 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 4-pin plug, A-coded) 3 1 3 SI0 V 0 V for SI unit operation MS NS L/A1 L/A2 PWR(V) 4 Ground

EX260-SPN-A_eng

Fieldbus interface connector layout 6 SF BF L/A1 PWR L/A2 PWR(V) BUS OUT: M12 4-pin socket D-coded (SPEEDCON) 1 No. Designation Description 4 1 TD+ Transmit Data + LED Status Description 2 Thank you for purchasing an SMC EX260 Series Fieldbus device (Hereinafter referred to as "SI unit" ).

EXxx-OMV0018_ENG

Element Description Safety Instructions S/E ST L/A1 PWR(V) L/A2 Fieldbus interface connector (BUS OUT/Port2) 1 POWERLINK connection PORT 2 (M12 4-pin socket, D-coded) LED Status Description These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Fieldbus system Ethernet POWERLINK compatible SI unit

BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected. Green flashing Valve is short circuited or disconnected.

Rotary Table

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or