Aluminum High Vacuum Angle Valve Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in
each Shock resistance Endurance 10 G; X, Y, Z directions, 3 times each CE2 Impact resistance 250 g or less Weight ML2B 3-point Preset Counter/Dimensions C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-31 31 Series CEU Extension Cable How to Order CE1-R Cable length Suffix 05 10 15 20 Extension cable Nil 5 m 10 m Extension cable & connector C 15 m 20 m Extension cable CE1R Stroke reading cylinder
each Shock resistance Endurance 10 G; X, Y, Z directions, 3 times each CE2 Impact resistance 250 g or less Weight ML2B 3-point Preset Counter/Dimensions C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-31 31 Series CEU Extension Cable How to Order CE1-R Cable length Suffix 05 10 15 20 Extension cable Nil 5 m 10 m Extension cable & connector C 15 m 20 m Extension cable CE1R Courtesy of Steven Engineering
Rc P 4 x J 4 x FD CHQ Width across flats G GA 4 x J Air release GB Cushion adjustment screw CHK MM R (max.)
HIROSE ELECTRIC CO., LTD. 3M Japan Limited Fujitsu Limited Cable length (L) Assembly part number Note 1.5 m AXT100-DS25-015 Cable 0.3 mm2 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 * For other commercial connectors, use a 25-pin type with female connector conforming to MIL-C-24308. * Cannot be used for movable wiring Electrical Characteristics Connector manufacturers example Item
50 40 60 60 50 50 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber 0 to 120 30 to 200 0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.
Description Body class Symbol Bracket assembly LQ-GBL J K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L M L type M type (for short piping) Table 1 Tubing size symbols Part No.
GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125
S Dimensions R V Head side flange style (G): CG5GNS GA GB FT Width across flats KA 2-Rc P H1 Width across flats B1 D I RE A B AL A MM Width across flats NA K REC C0.1 8-J 4-FD M S + Stroke ZZ + Stroke H FX0.15 B CX CY Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 MQQ M Up to 200 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25
M: 3 mm or more 7 mm or less XA1 XA11 SR5 mm or more 20 20 SR5 mm only M: 8 mm or less M: 4 mm or more 8 mm or less SR6 mm or more 25 25 SR6 mm only M: 10 mm or less M: 4 mm or more 10 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC A + 2 stroke RB Built-in One-touch fittings (20 to 50) Tubing O.D.
Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8
J PW GB PH 2 x Cushion valve Width across flats B1 MM LZ D E C B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35
plate assembly u F kit L kit T kit S kit P (J) kit q !
5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.
ll4 x 1.5 45.0 16.0 8.0 5.0 35.0 30.0 t5_0 |l/A 25.5 Utill6r 1.5 lJ 190 t8143 (LR)0EM.35M(B)[116 x ].5 Ufili20xl.5 tJl ?646t43 (LR)0fM.5M(8) M?0 x 1.5 25.5 see drawing Ufltt25xl.5" tl 13004143 oEMt.0MtAPlloMt M?5 x 1.5 25.5 lt25x2" lltJ568l43 HPII OM( M25 x2 25.5 Uflt/|27x3" ll t2587143 0tMt.0M M ? 7 x 3 15.5 *Please use specLal jam nuls only. All dimensions in m llimeters.
B Counter bore depth C 2 x 4-MM thread depth M 4-J x E (depth) H 2-P (piping port) Y T T HA CB L HP TC F X WP GW GP WS QW PW D 4-LD W K With switch rail Plug HS Q + Stroke G Z + Stroke HR CR Area E (Area E) For CY1R25, 32, 40, 50, 63 (mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2