Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

Electric Actuators

a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 0 10 20 30 Transfer load m (kg) 4000 a=1000 L3 (mm) L3 a = 2000 2000 a = 3000 Mey m a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 150 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PC 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Modular F.R.L. Unit

J G A OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

Rated Pressure Range: -14.50 to 14.50 psi, Piping: NPT1/8, w/M5 Female Thread, Output Specification: NPN Open Collector 2 Outputs+Copy Function, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Rated Pressure Range: 0.00 to -14.69 psi, Piping: NPT1/8, w/M5 Female Thread, Output Specification: NPN Open Collector 2 Outputs+Copy Function, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Piping: NPT1/8, w/M5 Female Thread, Output Specification: NPN Open Collector 2 Outputs+Copy Function, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Smooth Cylinder/Low Speed Cylinder

-X 1235 Series CS2Y Dimensions Center trunnion: CS2YT With rod boot Z + 1/2 stroke Port V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve Width across flats KA Z1 + l + 1/2 stroke MM TDe8 R TY D E e AL l f K A F N N TT C h + l B ZZ1 + l + Stroke TX H M S + Stroke TZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) B C MM A AL D E F G J V W K KA M N 125 140 160 M30 x 1.5 50 47 143 115 32 71

LX

(mm) D E Model LXPBAB50S--X LXPBAB75S--X LXPBAB-100S--X LXPBAB-125S--X LXPBAB-150S--X LXPBAB-175S--X LXPBAB-200S--X 44 52 120 90 Note) The overall length of an actuator is Stroke + 124 (141) + Motor dimension.

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P (Rc, NPT, G) 4 x J Cushion valve REA MM REB D E e REC Smooth Smooth H K A AL ZZ + Stroke M S + Stroke N N ZZ1 + l + Stroke h + l l f F B C Low Speed MQ (mm) RHC Bore size (mm) A AL lB lC D E F G J V W K KA M MM RZQ 125 50 47 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 27 M30 x 1.5 140 50 47 157 128 32 71 43 15 M14 x 1.5 15 17 15 27 27 M30 x 1.5 160 56 53 177 144 38 78.5 42 18 M16 x 1.5 15

ZP3

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B + Stroke A + Stroke K M E J 2 x 4-OA counterbore depth RA L S Rod end male thread Rod End Male Thread H1 Bore siz e (m m) A C1 1 H1 L1 X 125 140 160 141 141 155 42 42 47 M30 x 1.5 M30 x 1.5 M36 x 1.5 58 58 64 45 45 50 Rod end nut C1 X L1 Switches in the above figure are the case for the reed switches D-A73 type and D-A80 type.

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Best Pneumatics Vol. 14

VBA Spacer with Bracket (Z) VE G VY1 Center of F.R.L. body G C BB (Y100T, Y200T only) E 1 PPA X-X EE (Y100T, Y200T only) RELEASE X B 2 AL E X G Seal Y400T Y200T J F A H K Spacer width D (mm) Applicable model G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 K 25 30 41 50 50 70 F 6.8 12 14 18 18 20 J 2.8 3.2 4 4 4.6 6.4 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86

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El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.