1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Material VXA Body Diaphragm Note Actuator section End plate Symbol Applicable tubing size PFA PPS PTFE Nil VN Body class Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes LVC 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type LVA Symbol Thread type 4 one-touch fitting 6 one-touch fitting M5 x 0.8 Body class 1 2, 3,

LVQ

Pilot port thread type Symbol Symbol Nil Application Ports A & B same size 2 3 4 6 5 Nil M R N Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1/8 LQ1 integral fitting LQ1 integral fitting Threaded Threaded LVC Metric sizes 04 06 08 10 12 19 25 4 6 8 10 12 19 25 Different diameter tubings can be selected within the same body class.

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

3 Port Solenoid Valve

SS07 3 M01 08 C Body Ported Manifold Stacking type SS073M01-04C 1 set Manifold Base no. Valve no. S070M-5BG-32 4 set Ports 3 port 3 Prefix the symbol to the solenoid valve part number. Port size Write sequentially from the 1st station on the D side.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

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ShockAbsorbor ' Ser'es C85 ISO Cylinder 08 to s25mm Conforms to ISO 6432 and CETOP RP52P. Senbs CU Frce Mount Cylindel oG to o32mm A space-saving cylinder with multiple mounting sudaces.

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/l6 One touch f uinq or '4 One{ouch f lt nq o318 Oneiouch litting sv3000 o5l16' One touch fliing o3,/8 One-touch f1t no (16 Onerouch 'rftng 03' OneioLch fltng o l O one-louch Itl ng sv2000 o8 Ofe louch o6 One-toucrr 08 One touch a12 One'louch Itlng sv3000 n.rs. ol mrxed spec I caL o. rL/t rd cale sc.aral.y.n. man'o r sie. l.ator s re.t 66 rt Manifold Circular Connector Series .

Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø20, Pad Styles: B (Bellows), Material: N (NBR), Vacuum Entry: B5 (Female Thread M5X0.8)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: D (Deep Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø16, Pad Styles: D (Deep Style), Material: S (Silicon Rubber), Vacuum Entry: B5 (Female Thread M5X0.8)

Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)