KJ

(mm) Note) Weight (g) L2 A M L1 D1 D2 Urethane KJL23-04 KJL23-06 KJL04-06 1.1 1.2 1.4 Note) D1: Max. diameter 4 6 6 24.3 25.3 15.8 16 25.7 3.2 2.2 2.6 12.7 8.4 6 14.5 4 16.9 12.7 3.5 3.5 6 15.6 9.3 Applicable tubing Applicable fitting Extended Male Elbow: KJW H (width across flats) Applicable tubing O.D.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(In comparison with control by speed controller) Applicable model: ASV310F, ASV410F, ASV510F C With spatter cover Body size K Hexagonal lock nut 1 2 3 4 5 M3 M5 1/8 1/4 3/8 Note) Option should be indicated in order of C and K. Available only for ASV310F, 410F and 510F. Seal Seal Symbol Applicable model Silencer and One-touch fittings are installed.

Lubricator Series AL10 to 60

Applicable model Accessory AL30 AL40 AL40-06 AL50 AL60 AL10 AL20 Bracket assembly Note) AF20P-050AS AF30P-050AS AF40P-050AS AF40P-070AS AF50P-050AS AF50P-050AS The part number for bracket assembly for 1000 cm3 is AF50P-050AS (applicable to AL30 to AL60). Note) Assembly includes a bracket and 2 mounting screws. 14-2-61

ATX-OM-F003E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions HAW2/7 HAW22 to 110 2VHAW110-30 Flange (mm) Model A B C D E F G H J K L M N P Q R S T U V W Y Z ZA HAW2-04 360 190 83 35 270 35 130 203 159 159 182 209 60 60 94 4.5 10 1/2 1/2 1/2 HAW7-06 570 390 83 35 480 35 130 203 159 159 182 209 60 60 94 4.5 10 3/4 1/2 1/2 HAW22-14 948 575

Activated Carbon Filter

How to Order 50 06 B AMK D Symbol Description Body size 50 60 Nil Rc Thread type N NPT F G 06 3/4 1 Port size 10 Nil Without mounting option Options Mounting a B With bracket Nil Flow direction: Left to right b Flow direction Semi-standard R Flow direction: Right to left Nil Pressure unit: MPa Temp. unit: oC c Pressure unit Temperature unit Z Pressure unit: psi Temp.

Flame Resistant

How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.

E-P HYREG

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) Tightening the fittings and their torque When screwing fittings into the valves, make sure to tighten them to the proper torque values given below.

Manifold Specifications

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1.3 0.12 0.31 1.5 0.12 0.37 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.35 1.6 0.10 0.36 1.4 0.14 0.36 1.5 0.11 0.35 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Manifold Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

7ND9071en

Ex nA IIC T4/T5/T6 Gc Temperature range: T4: -40 to +85 C; T5: < +75 C; T6: < +60 C. Z Ex ic IIC T4/T5/T6 Gc Ex ic IIC T4/T5/T6 Temperature range: T4: -40 to +85 C; T5: < +75 C; T6: < +60 C. 06 High capacity. Stroke volume of actuator > 3 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series).

HRX-OM-X010

HRZ002-WS/W1S-F: -15.0 to 90.0 deg C HRZ004/008/010-WS/W1S-F: -25.0 to 90.0 deg C HRZ***-W2S-F: 5.0 to 60.0 deg C HRZ008-L/L1-F: -25.0 to 40.0 deg C HRZ002-WS/W1S-F: -15.0 deg C HRZ004/008/010-WS/W1S-F: -25.0 deg C HRZ***-W2S-F: 5.0 deg C HRZ008-L/L1-F: -25.0 deg C 32 Reservoir Low Temp.

10

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Clean Regulator

Flow Rate Characteristics Construction XT13-394-06, 10 Max. operating flow rate It is recommended to be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

KDM

No. of connection tubes Plug Model Color of release button D Socket KDM10S-23 KDM10S-04 KDM10S-06 KDM10S-08 KDM20S-23 KDM20S-04 KDM20S-06 KDM20S-08 KDM10P-23 KDM10P-04 KDM10P-06 KDM10P-08 KDM20P-23 KDM20P-04 KDM20P-06 KDM20P-08 3.2 4 6 MS Irregular faces for engagement 10 Allen wrench (Nominal width across flats 4) T 8 3.2 Blue VMG 4 6 8 20 Clamp bolt Panel mounting 1.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8