CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

MGG

Consult SMC concerning water resistance, flexibility of lead wires and usage at welding sites, etc. 55 Series MGG Specific Product Precautions 1 Be sure to read before handling. Refer to pages 49 through 55 for safety instructions, actuator precautions and auto switch precautions. Mounting and Adjustment Warning Caution 1.

MXS

65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 M 92 92 92 102 115 156

Free Mount Cylinder

80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-55-1B SY5000-55-1B SY7000-55-1B Applicable series 10-SY3000 10-SY5000 10-SY7000 10-SY3000 10-SY5000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size One-touch fitting for 5 / 16" One-touch fitting for 3 / 8" One-touch fitting for 3 / 8" Assembly part No.

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

AC

End plate ass'y 1 pc. 1.5-26 ARM2500/3000 Dimensions Dimensions B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L2 L3 With auto switch Without auto switch Standard stroke (mm) Bore (mm) 12 16 20 25 L L1 FD FT FV FX FZ Inch Inch Metric 24 25.5 28.5 32.5 Metric 14 15.5 18.5 22.5 A 44 44 55 59 B 27 27 36 39 A 39 39 45 49 B 22 22 26 29 11.5 11.5 12.5 14.5 21.5 21.5 22.5 24.5 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 3.5 3.5 4.5 5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 5 to 30 5 to 30 5 to 50 5 to 50

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10 x 1.25 M32 x 2 23 10 8 M14 x 1.5 3.2 134 The bracket is shipped together.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

SMC

65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA F H MM U FD FT FX FY ZX ZY Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth