Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE *LQA   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Series: 5 (ø16mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 16A (ø22mm), Pilot Port Thread: ø6mm One-touch Fitting, Pilot Port Position: 1, Material: FKM, Option: 1 (With Flow Rate Adjustment)

Variation: A (Normally Closed, Bellows Seal), Flange Size: 16, Indicator, Actuator Port Direction: A (w/Indicator, Actuator Port Direction on Flange Side), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)]

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open/

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: G (G), Port Size: 04 (1/2), Applicable Tubing O.D.: 16 (ø16), Seal: w/o Sealant

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: R (or Metric), Port Size: 04 (1/2), Applicable Tubing O.D.: 16 (ø16), Seal: w/o Sealant

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 1 (Meter-in, Light Blue Handle), Port Size: U04 (Uni 1/2), Applicable Tube O.D.: 16 (ø16)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out, Gray Handle), Port Size: U04 (Uni 1/2), Applicable Tube O.D.: 16 (ø16)

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: N (NPT), Port Size: 04 (1/2), Applicable Tubing: 16 (ø16), Seal Method: None

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Applicable Tubing: 16 (ø16), Seal Method: None

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: R, Port Size: 04 (1/2), Applicable Tubing: 16 (ø16), Seal Method: None

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: G (G), Port Size: 04 (1/2), Applicable Tubing: 16 (ø16), Seal Method: None

Body Size: 4 (1/2), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: R, Port Size: 04 (1/2), Applicable Tubing: 16 (ø16), Seal Method: None

Series: KQ2, Model: L (Union Elbow, Plug-in Elbow, Reducer Elbow), Applicable Tubing O.D.: Ø12, Port Size/Applicable Tubing O.D.: Ø16, Thread Material/Surface Treatment: A (Resin Body), Release Button: None, Made to Order: X35 (Body Color: Black; Release Button Color: Orange)

Series: KQ2, Model: T (Union Tee, Different Diameter Tee), Applicable Tubing O.D.: Ø12, Port Size/Applicable Tubing O.D.: Ø16, Thread Material/Surface Treatment: A (Resin Body), Release Button: None, Made to Order: X35 (Body Color: Black; Release Button Color: Orange)

Series: KQ2, Model: R (Plug-in Reducer), Applicable Tubing O.D.: Ø12, Port Size/Applicable Tubing O.D.: Ø16, Thread Material/Surface Treatment: A (Resin Body), Release Button: None, Made to Order: X35 (Body Color: Black; Release Button Color: Orange)

Body Size: 1/2, Type: Elbow, Control Type: Meter-in, Light Blue Handle, Port Size: Uni 1/2, Applicable Tube O.D.: ø16

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Push Lock Type, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Types of Screw: G, Applicable Tube O.D. mm(mm): 16,