Vacuum Unit Series ZK2

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

7.5

Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat ribbon cable (PC wiring, with power supply terminal) Symbol Stations 02 08 2 stations 8 stations SS3J3-V60PD2-06D 1 set (Manifold part no.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Air Cylinder NCQ7 Series Compact Cylinder

RCSK-o15 RCSK-02 RCSK-03 RCSK-04 BCSK-05 RCSK-O5 RCSK-08 RCSK-10 Double Hod clevi6 w/ oin(1). retainina rinos{2) RCDK-015RCDK.02 RCDK{3 RCDK-04 RCDK.OS RCDK.05 RCDK-08 RCDK.lO 'Jah nul sold separatly 'For accessory parl dimensions see cat.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

30

(mm) Note 2) Effective area (mm2) Applicable fitting size d 4 6 8 10 12 16 D Note 1) D Weight (g) Applicable tube M L A Model KQB2R23-04 KQB2R04-06 KQB2R06-08 KQB2R08-10 KQB2R10-12 KQB2R12-16 3.2 4 6 8 10 12 12 12.6 13.6 16.1 17 18.6 3.4 5.6 13.1 26.1 41.5 58.3 9 9 12 14 17 19 32.9 34.4 38.4 41.9 44.8 42.9 20.3 20.8 22.3 24.9 26.2 22.1 4.9 7 12.7 19.2 27.8 37.2 M Applicable fitting size d

25

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M5 thread. Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

CNA

Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 Auto switch model Foot 50 63 80 100 CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NT D-F5BAL/F59F Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 Single clevis CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 BT-04 BT-04 BT-06 BT-08 BT-08 Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 When ordering foot bracket

Unit Manifold Valve

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.

CNA

Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 Auto switch model Foot 50 63 80 100 CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NT D-F5BAL/F59F Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 Single clevis CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 BT-04 BT-04 BT-06 BT-08 BT-08 Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 When ordering foot bracket