Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Brake mechanism added

2 3 4 3 2 1 699

A_HEC-OM-J017

HEC ii CONTENTS CONTENTS Pages 1 Preparation for Communication -1-1 2 Specifications of Communication Method -2-1 3 Communication Format -3-1 3.1 Control code used for communication -3-1 3.2 Command code list -3-1 3.3 Communication procedures and format -3-2 3.4 Calculation of checksum -3-3 4 Details of Communication format -4-1 4.1 Temperature setting (without writing EEPROM) -4-1 4.2 Reading

NAIV

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

Fitting Type: R (Run Tee), Size Combination: 3A (Tubing: 3/8" x 1/4"; Thread: 1/8"), Piping Type: M (Male)

Fitting Type: R (Run Tee), Size Combination: 3A (Tubing: 3/8" x 1/4"; Thread: 1/8"), Piping Type: F (Female)

Fitting Type: R (Run Tee), Size Combination: 3A (Tubing: 3/8" x 1/4"; Thread: 1/8"), Piping Type: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Size Combination: 3A (Tubing: 3/8" x 1/4"; Thread: 1/8"), Piping Type: F (Female), Thread: N (NPT)

smcmaintenancepartslist

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

modular-press-e

1 !0 o !1 y y !2 !2 IN OUT IN OUT u r t i u r t i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG. *BLUE links will lead to purchase pages. Replacement Parts Description Material Qty. Note Part no. No.

Modular F.R.L. Pressure Control Equipment

1 !0 o !1 y y !2 !2 IN OUT IN OUT u r t i u r t i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG. *BLUE links will lead to purchase pages. Replacement Parts Description Material Qty. Note Part no. No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 1.12-32 VQZ1000/2000/3000 Base Mounted Caution Valve Mounting Mounting 3 Port Valves on 5 Port Manifolds(VQZ 85 , N.C./ VQZ 95 , N.O.) 1 2 3 0 1 1 2 3 0 1 After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.