Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

8 A port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A P, R port thread -+ -+ -+ -+ -+ -+ -+ -+ Manifold type Stations Nil Rc G NPT NPTF R P 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T R P P Port 1/4 R port 1/4 P Port 1/8 R port 1/8 Note) For more than 6 stations for type 20 and more than 9 stations for type 21, supply air to both sides of P port

45

-51A-N7 VVQ1000-51A-N9 One-touch fitting for 1/4" One-touch fitting for 5/16" Note 1) P and R ports cannot be changed.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(TT) 52-SY9440 (R) -TT03 04 3 Max.10 L 234.1 5 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 125.3 22

3 Port Solenoid Valve

1 !0 !3 o !2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

45

-51A-N7 VVQ1000-51A-N9 One-touch fitting for 1/4" One-touch fitting for 5/16" Note 1) P and R ports cannot be changed.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

3 Port Air Operated Valve Series SYJA300

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

SYJ300/500/700

+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

to 20 in/sec/50 to 500 mm/s Piston speed CJ1 Option (No additional charge on 7/8" and 1 1/4" bore) Rubber bumper CJP Not required (Pre-lubricated at Factory) Lubrication B, C, E, R Mounting CJ2 Note) R mount available on 3/4", 1 1/16", and 1 1/2" bore only.

AC Servo Motor Driver (Pulse input type/Positioning type ）

error 1-4 EDB 0 1 1 0 2A.5 Linear encoder error 1-5 EDB error 1 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter 2B.1 Encoder counter error 1 EDB 1 1 1 0 2B.2 Encoder counter error 2 EDB error 30.1 Regeneration heat error DB (Note 1) (Note 1) 30 Regenerative error 30.2 Regeneration signal error DB (Note 1) 0 0 0 1 (Note

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

AC Servo Motor Driver (Network card type ）

.1 Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A 2A.4 Linear encoder error 1-4 EDB Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error 1 EDB 2B.2 Encoder counter error 2 EDB 30.1

C85

MB1 Rod cover Head cover N Head cover E Head cover F Head cover Y Cylinder tube Piston rod Piston A Piston B 1 1 1 1 1 1 1 1 2 1 1 2 1 2 1 2 1 1 q y u i o !0 !1 !2 !3 !4 (Switch type only) 2A CA2 2B (2 for switch type) 2C CS1 2D e r C76 Nickel plating Nickel plating 5A C85 (Switch type piston) 5B C95 C8520/25 Rubber cushion !8 2A o y !6 !9 u q r e !3 t !7 !5 !2 !4 i !

C85

MB1 Rod cover Head cover N Head cover E Head cover F Head cover Y Cylinder tube Piston rod Piston A Piston B 1 1 2 1 2 1 2 1 1 1 1 1 1 1 1 1 1 2 q y u i o !0 !1 !2 !3 !4 (Switch type only) 2A CA2 2B (2 for switch type) 2C CS1 2D e r C76 Nickel plating Nickel plating 5A C85 (Switch type piston) 5B C95 C8520/25 Rubber cushion !8 2A o y !6 !9 u q r e !3 t !7 !5 !2 !4 i !

4/5 Port Air Operated Valve Series SYJA3000

SYJA3140 1 pc. SYJA3240 1 pc. SYJ3000-21-2A 1 pc. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position pressure center 3 position pressure center The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Connection bracket q, w, Gasket r, O-ring t, u Plug-in type VVFS3000-2A-1 11 End plate (U side) assembly VVFS3000-2A-2 End plate (U) !1, Connection bracket q, w, Gasket r, O-ring t, u End plate (D) !2, Connection bracket q, w, Gasket e End plate (D) !

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed