CE

4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5

CE

4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5

Electric Grippers

Compact 20 10 10 4 3 to 6 16 to 40 11 to 28 6 to 14 25 16 14 6 4 to 8 32 20 22 52 to 130 10 16 to 40 11 to 28 40 25 30 84 to 210 14 F Type (2 fingers) S Type (3 fingers) Can hold various types of workpieces with a long stroke.

CE

4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5

MY1

14 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type 4.

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

Air Slide Table Series MXP

D-M9BW(V), D-M9NW(V), D-M9PW(V) Stroke (mm) 20 41 29 41 29 47 35 Stroke (mm) Model Model Normally closed (NC = b contact) solid state auto switches (DF9G/F9H types) and a solid state auto switch (D-F8) are also available.

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Compact Cylinder

26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8

Electric Actuators

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5 28.5 29.5 32.5 29.5 30.5 33.5 29.5 30.5

KF

25 36 16 25 37 16 24 36 32 40 65 31 39 64 33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5

Air Cylinder Series MB

19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 12 16 19 24 34 34 34 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Wedge Cam Operation Provides

16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

20 105 MHKL2-12S Normally open Normally closed Without magnet MRHQ 16 17 14 14.6 28.6 165 MHKL2-16S EPDM seal/Fluorine grease 20 32 18 16 34 314 MHKL2-20S Fluorine grease MA 25 53 22 19 41 565 MHKL2-25S Finger: Side tapped mounting 12 11 11 9 20 105 MHKL2-12C DFinger: Through-hole mounting 16 22 14 14.6 28.6 166 MHKL2-16C Dust cover adhesion 20 40 18 16 34 314 MHKL2-20C Dust cover adhesion