3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Fieldbus system EtherCAT compatible SI Unit

UNSIGNED8 Number of Channels 40x2:03 40x2:04 Channel 2 Channel 3 (Output setting value during communication fault) UNSIGNED16 0 to 0xF 40x3:0 Idle mode UNSIGNED8 Number of Channels 40x3:03 40x3:04 Channel 2 Channel 3 (Output setting during communication idling) Enum0800 0=Disable (Hold) 1=Enable (Fault value) 40x4:0 Idle value UNSIGNED8 Number of Channels 40x4:03 40x4:04 Channel 2

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

VQZ1000/2000/3000

-06 AS4001F-10 AS4001F-12 Silencer AN300-03 2-7-30 31 31 Series VQZ Model Selection Base Mounted Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/Surge voltage suppressor Manual override Metal Rubber VQZ1000 VQC 2 position single (B) 2 (A) 4 SQ 0.70 1.3 5 (R1) 1 (P) 3 (R2) 2 position double VQ0 (B) 2 (A) 4 Grommet (G) VQ4 5 (R1) 1 (P) 3 (R2) VQZ2000 3 position

Digital Flow Switches

B 82 Sensor unit Display unit (PF2A30/31) 23 60 1.6 48.2 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24 VDC 4 3 7 34 54 44 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 4-4.5 40 50 Brown 1 2 6 Analog output Main circuit Main circuit 4 8 + Load 2 Switch output 12 to 24 VDC White 4 3 7 Black (44.2) A 3 1 5 Blue Load is an analog input

3 Port Air Operated Valve

(PA) port NC 33 12 4.5 2A 31 41 107.1 (2) (9) 115.1 2 x 5.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M6 thread) (6.4) 12 64 9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A 31

Air Cylinder Series MB

25.5 34 25.5 31.5 28.5 25.5 38.5 27.5 36.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 42 33 31 38.5 31 36 33.5 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 46.5 39 36 43 36 40.5 38.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 51.5 44 45 52 45 49 46.5 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71

Manifold Specifications

VP4 Stations P, R port thread type Series VZ300 Body ported 4(A), 2(B) port 03 3 stations VZS Nil Rc G NPT Adapter plate assembly 12 12 stations 00F VFS 1(P) port Rc 1/8 00N Manifold gasket Round head combination screw NPTF 00T VS4 Rc 1/8 3/5 (R) port Adapter plate VQ7 Option Adapter gasket EVS Blanking Plate Assembly Combinations of Solenoid Valve, Gasket and Manifold Base DXT192-13-1A

PF2A/PF2W

Fluid Temperature compensation element Vortex generator Vortex detector Fluid velocity detection element Top view 16-11-34 31 Series PF2A/PF2W Specific Product Precautions 4 Be sure to read before handling. Set Flow Rate Range and Rated Flow Rate Range Caution Set the flow rate within the rated flow rate range.

MB

23 27.5 23 40 27.5 27.5 38.5 36.5 29.5 81.5 42 34 71.5 30 26 27.5 33 26 27.5 26 CS1 50 34.5 34 43.5 41 33.5 87 46.5 38 77 34.5 31 39 31 31 63 39.5 39 48.5 46 39 93.5 51.5 43 83.5 40 36 44 36 36 C76 80 46.5 46.5 55 52.5 47.5 103 58 52 92.5 48.5 45 51.5 45 45 100 55 55 62 59.5 55.5 113.5 65.5 60 103 56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65

Membrane Air Dryer

Port size Symbol Port size Size 30 50 60 75 100 02 03 04 Bracket Assembly (Accessory) Part No. $ $ 1/4 $ $ $ $ $ 3/8 Part no.

0.

For DIN rail part no., refer to page 31. Note 2) When two or more symbols are specified, indicate them alphabetically.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

VS 8-2/VS 8-4

AS-Interface (8 in/8 out, 31 slave modes, 2 power supply systems, COM.) AS-Interface (4 in/4 out, 31 slave modes, 2 power supply systems, COM.) SI unit 2 AS-Interface (8 in/8 out, 31 slave modes, 1 power supply systems, COM.) AS-Interface (4 in/4 out, 31 slave modes, 1 power supply systems, COM.) CANopen (COM.) ControlNet (COM.) EtherNet/IP (COM.)

Digital Flow Switches

Dimensions: Remote Type Sensor Unit for Air PF2A510, 550 Internal circuits and wiring examples 98 82 23 B Sensor unit Display unit (PF2A30/31) 48.2 60 1.6 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24VDC 4 3 7 34 44 54 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 40 50 4-4.5 Brown 1 2 6 Analog output Main circuit Main circuit 4