Stability of suction position,

11 61 11 84.5 53.61) 22 75 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100 71.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80BMJB10 126.5 186.5 497 492 532 ZP3E-YF80BMJB30 151.5 211.5 529 524 564 ZP3E-YF80BMJB50 171.5 231.5 553 548 589 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF100BMJB10 136 196 605 594 677 ZP3E-YF100BMJB30 161

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

MY2

(Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161

Special Specifications:

One-touch fitting applicable tube size In case that the type of thread is Rc, G: 10 In case that the type of thread is NPT: 3/8 63 76 90 106 122 160 134 150 250 350 450 550 650 148 161 187 202 229 259 147 173 188 215 245 8B 11B 22B 37B Size: AFF75B, AM850 (220) (220) 266 266 (344) 379 23 (58) 3/8 female thread Drain Rc 3/8 Drain 14-20-60 Bowl Assembly Series AFF-CA, AM-CA Series AME, AMF

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Single vane Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 90 162 1 25 180 161 90 90 261.5 3 30 180 259.5 90 440 7 50 180 436 10 22.5 90 675 20 60 180 670.5 Positioning pin hole Allowable Load Adjustment bolt (A) Adjustment bolt (B) Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 147 147 149 152 152 153 153 154 155 158 158 159 160 161 166 166 170 174 174 175 175 175 176 177 178 179 180 181 181 182 183 184 184 -X10: Both Sides Angle Adjustable Type. -X11: One Side Angle Adjustable, One Side Cushion Type .

CV/MVGQ

24 22 41 47.3 8 76 M14 x 1.5 Single Acting/Spring Extend Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 QY Bore size (mm) Bore size (mm) NN NA N Symbol Q HX S Z ZZ S ZZ Z ZZ Z S ZZ Z S ZZ Z S Bore (mm) CC 20 25 32 40 20 25 32 40 20 25 32 40 M20 x 1.5 24 15 19.8 65.3 14 191 182 137 166 157 112 141 132 87 M26 x 1.5 30 15 22 70.5 14 195 186 137 170 161

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 MI W S 26 17 IN 60 51 43 34 85 94 63 OUT 220 188 157 126 314 20 10 CEP1 71 47 IN 165 142 118 94 236 147 98 OUT 344 295 245 196 491 25 10 CE1 124 82 IN 288 247 206 165 412 241 161

ML2B

Theoretical Output CE1 (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 98 161 251 CE2 0.8 0.7 343 563 879 0.6 294 483 754 0.5 245 402 628 0.4 196 322 502 0.3 147 241 377 Stroke Adjusting Unit Specifications 25 32 40 490 804 1256 392 ML2B 643 25 RB1007 5.9 7 1500 70 4.22 6.86 32 RB1412 19.6 12 1500 45 6.86 15.98 40 RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 Applicable bore

MU

Output (N) 25 32 40 50 63 Operating pressure (MPa) Bore size (mm) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Basic style 0.18 0.28 0.42 0.80 1.20 0.7 0.6 0.5 0.4 0.3 0.2 Axial foot style 0.25 0.42 0.63 1.14 1.83 344 295 246 196 147 98 491 OUT 25 12 Basic weight Flange style/Rod side, 265 227 189 151 113 76 378 IN 0.28 0.42 0.65 1.26 2.03 Head side 563 482 402 322 241 161

CXS

9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161

MLGP

pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 25 12 378 340 302 265 227 189 151 113 76 378 IN 1 pc. 15 5 10 20 25 804 724 643 563 482 402 322 241 161

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

www.stevenengineering.com Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYP15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYP32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Magnetic holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 53 35 18 176 32 241 161

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Theoretical Output (N) Magnetic holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm2) 15 0.1 0.3 0.2 59 15 32 18 53 35 176 268 32 241 161

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For details, refer to the Made to Order Specifications on page 8-31-1. 8-12-15 16 Series MY1W Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 200 40 60 80 100 120 140 160 16 314 62 94 125 157 188 219 251 20 490 98 147 196 245 294 343 392 25 804 161 241 322 402 483 563 643 32 1256 251 377 502 628 754 879 1005 40 1962 392 588 784

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161

10-cls-e

Switches Load voltage Lead wire length (m) Applicable load Indicator light Auto switch model Special function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

Title not found

encoder) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

LG1H

Model Note 15 20 25 30 1000 1000 930 740 600 500 LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible controller: LC1-12HC2Consult SMC if outside of the above conditions. 161