Compact Cylinder, CQ2-Z. 143 lb.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across flats 1.5) 22 25 2 x M5 x 0.8 Port size 2 65 69 4 4 9 5 9 4.5 4.5 24 11 B port A port 5.5 2.2 40 5 3.2 5.5 98 (117): With auto switch 84 (103): Without auto switch 138 (157): With auto switch 124 (143

SMC

29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143

Rotary Actuator/Vane Type

Size CRBU2 [g] Reduction rate [%] Current model [g] 10 42 12 47.5 15 64 12 73 20 Interchangeable mounting with the current model 130 10 143 30 248 5 263 40 465 5 491 Compared with single vane at 90 Six types of direct mounting are possible.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

7

IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 ( ): Denotes the Normally Open (N.O.) dimensions. 143

3

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 (663)(179) 0.9 0.95 Downstream pressure of valve (P2) [MPa] (662)(174) 0.9 0.8 0.85 (661)(170) 0.8 0.7 0.75 0.7 Subsonic (660)(164) 0.6 0.65 Critical pressure 0.6 (658)(158) 0.55 0.5 0.5 Sonic (656)(151) 0.45 0.4 0.4 0.35 (654)(143) 0.3 0.3 0.25 (650)(133) 0.2 0.2 0.15 (646)(120) 0.1 0.1 0.05 VXS235 Port size 1/4 VXS235

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

Stability of suction position,

ZP3E-T63BMl-B18 ZP3E-T80BMl-B12 ZP3E-T80BMl-B18 Width across flats 24 32 61 Width across flats 24 32 50 A A 43 57.5 12 B 35 49.5 12 B 18 12.5 85 80 57 68 63 45.8 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T63BMl-B12 M12 x 1.75 12 103 100 123 ZP3E-T63BMl-B18 M18 x 1.5 18 92.5 89.6 113 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T80BMl-B12 M12 x 1.75 12 148 143

MVGQ

DMVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions -X Symbol A E Symbol Bore size (mm) 80 DB E A DB Stroke Bore size (mm) Up to 50 st Over 50 st Up to 50 st Over 50 st 2080 84 143 9.5 25 68.5 93 28 18.5 Data 100 100 89 153 5 30 69 105 36 21 10-16-17 18 Series MVGQ Construction Series MVGQM For 12 to 25: MVGQM12 to 25 Over 50 stroke Courtesy of Steven

RZQ

REC Table 2 Additional Weight Unit: kg Bore size (mm) CX Item Model 32 40 50 63 RZQ RZQL RZQG,RZQF RZQD 10 mm increase of first-stage stroke 3 3 6 15 CY Foot style (including bolts) 143 155 243 324 Flange style (including bolts) 165 198 348 534 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

C85

32 15 8 15 50 12 16 8 17 10 22 11 28 20 11 33.5 S Z ZZ XC Bore 1 to 50 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153(156.5) 127(130.5) 101(104.5) 169(172.5) 143

MB

16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143

CQM

Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288 125 143

MU

1.5 M12 x 1.75 ZZ 74 77 85 102 106 Model MUB25 MUB32 MUB40 MUB50 MUB63 Model MUB25 MUB32 MUB40 MUB50 MUB63 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface. 7-8-16 17 Plate Cylinder Single Acting, Single Rod, Spring Return/Extend Series MU Dimensions of Each Mounting Axial foot style CUJ (mm) ZZ 114 127 143

MGQ

56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143

MY1

plug) Stopper bolt adjusting unit Cylinder for driving (MY1BH-) RR SS RR SS NH H EY HL UU (TT) N A Rc 3/8 (Port) Rc 3/8 (Port) Z + Stroke T-slot section for mounting UU (TT) PL Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) MY1HTG MY1HTG (mm) A EY H HL L LL N NH NW PA PB PE PG Model MY1HT50 MY1HT63 220 207 97.5 145 23 210 102 30 143

06-cxwl-e

.: GR-S-010 (10 g) 143 Slide Unit/Built-in Shock Absorber Series CXWL Ball Bushing Bearing Type: 20, 32 Construction 20 @1 !3 @4 @2 @3 !5 !4 !2 With end lock 32 @1 @4 @2 @3 !3 !5 !4 !2 With end lock The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXWL. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No.