CL

Description Material Auto switch model 40 50 63 80 100 NBR NBR NBR NBR NBR NBR NBR NBR Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Tube gasket Cushion valve seal Piston gasket D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NTL, F5BAL, F59F D-A3/A44/G39/K39 D-B5/B6/B59W D-G5/K59/G5W/K59W D-G5BAL/G59F/G5NTL D-A3C/A44C/G39C/K39C #6 #7 #8 #9 $0 $1 $2 $3 BT-04 BT-04 BT-06 BT-08 BT-08 BD1

Combination Cylinder

Description Material Auto switch model 40 50 63 80 100 NBR NBR NBR NBR NBR NBR NBR NBR Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Tube gasket Cushion valve seal Piston gasket #6 #7 #8 #9 $0 $1 $2 $3 D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NTL, F5BAL, F59F D-A3/A44/G39/K39 D-B5/B6/B59W D-G5/K59/G5W/K59W D-G5BAL/G59F/G5NTL D-A3C/A44C/G39C/K39C BT-04 BT-04 BT-06 BT-08 BT-08 BD1

Table of Contents - Tubing

Model 6 Size: nominal size X length Number of pieces 8 12 4 6 8 10 12 TM-04 TM-06 TM-08 TM-10 TM-12 2 X 6 2.6 X 8 4 3 X 8 Tube Release Tool Series TG To remove tube in a confined space or from manifolded one-touch fittings.

Silencer Series AN

Construction/Parts/Dimensions AN10-C to 30-C B Dimensions (mm) Sound absorbing material A B C d 6 Model AN10-C06 AN10-C07 AN15-C08 AN20-C10 AN20-C11 AN30-C12 A C (Resin sintered body) 36.5 11 14.5 1/4 45 13 20 8 Body (Resin) 10 57.5 16.5 30.5 3/8 71.5 20 43.5 12 d 3 Silencer Metal Body Type Series AN00 RoHS How to Order Noise reduction 30 dB(A) Low back pressure Easy mounting 500 AN 06 Port

Stainless Steel 316 Fittings

16.6 18.5 M L Q A D D O N M M Note 1) D is maximum diameter.

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1008 1075 VCC-G-D-1 (Applicable fitting VCK ) VCC-G-D-1 2 13 Width across flats: 19 25.5 14 60 VCC-G-D-2 (Applicable fitting VCK ) 0806 0604 9 Width across flats: 17 20.5 14 50 For extending the socket VCC-G-D-1 VCC-G-D-1 113 VCC-G-D-1 VCC-G-D-2 97 17 VCC Series Disassembly/Assembly/ Maintenance Procedure Cleaning Valve Element Special tool part no.: VCC-G-C VCC13-00 (3 port valve) VCC12-

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

LVQ

LVQ20 C A B D (Max.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VR4151/4152

Output 1 Output 2 A B C Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 14.8 VR1211F-04 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 6.8 VR1211F-06 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 Inch Size Weight (g) Model d D1 D2 L3 L2 D3 L1

Shuttle Valve/AND Valve with One-Touch Fittings

10.4 56 20.3 32.2 21.9 15.7 15.8 25.2 14.8 6.8 VR1210F-06 6 12.8 12.8 53.2 35.6 25.2 16.8 16.8 23.0 22.5 VR1210F-08 8 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1220F-06 6 12.8 12.8 59 7.4 37.7 25.2 16.8 16.8 27.2 23.9 19.8 VR1220F-08 8 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-10 10 18.5 18.5 71.6 9.8 25.8 44.8 31 20.8 20.8 43.2 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 1 Output 2 A B C Dimensions L5 D2 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-23 14.8 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-04 6.8 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 VR1211F-06 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19