AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

PFxx-OMX0002

(Page 83) 2020 0x07E4 0 R/W rEv (Reserved Display setting) U8 0 Y 0: oFF (Normal display) 1: on (Reversed display) Reserved Display setting Setting range 0x0 to 0x000A (0 to 10) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 0 Y 1.0% increments 0: rAC 2040 0x07F8 0 R/W in (External input setting) U8 0 Y (Reset accumulation) External input setting 1: rPb (Reset peak/bottom) 2100 0x0834 0

Air Cylinder Series CM2

() 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJP 20 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5 6.5 9 10

Multi-channel Digital Sensor Monitor ( compatible)

0 kPa -0.02525 0 kgf/cm2 -0.000257475 0 -101 kPa bar -0.0002525 0 (-0.1) psi -0.00366225 0 inchHg -0.0074575 0 mmHg -0.1894 0 MPa 0.025 0 kPa 0.025 0 kgf/cm2 0.000254925 0 100 kPa bar 0.00025 0 (F0.1) psi 0.003626 0 inchHg 0.073825 0 mmHg 0.187525 0 MPa 0.025 0 kPa 0.025 0 100 kPa kgf/cm2 0.000254925 0 (0.1) bar 0.00025 0 psi 0.003626 0 -80No.PS-OMW0012-C [Inclination and intercept to the

Slider Type Ball Screw Drive/11-LEFS Series

0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load

Table of Contents

0 Misc.

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

LEC-OM02904

PD10 0h PD11 0004h PD12 0h PD13 0h PD14 *DOP3 D-3 0h ALM 0 0 0 WNGALM (WNG)(ALM) () 0 1 WNG 0 1 0 ALM 0 1 WNG 0 1 1 ALM . 0OFF 1ON PD15 *IDCS 0h TM C1MR Configurator2 0 0 0(/) 1() 0/ 1 0/ 1 0(/) 1() master-slave 0 0001 0010 5 30 5 No.

LX

Bank Point Home position sensor position 0. 1. 0 0 0 0 0 0 Moves to the motor side at home position return speed Decelerates and stops at the home position sensor ON position Moves to the end side at low speed Moves and stops at 16 pulse position from the home position sensor OFF position Coordinate attribute Coordinates Speed pattern Operating procedures 1.

Table of Contents

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

: Reserve 0 3: 0..10V 4: 0..5V 5: 1..5V 6: 0..20mA 7: 4..20mA 0x0382 CH0-CH1 Analog output range 1 Bit7-4: CH1 Bit3-0: CH0 Bit8-15: Reserve 0 0x0384 CH0-CH1 User setting value upper limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 0x0385 CH0-CH1 User setting value lower limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 CH0-CH1 Output

PFxx-OMX0007

PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) 1520 0x05F0 0 R/W 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: 1 (L/pulse) 1: 10 (L/pulse) 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1600 0x0640 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1800 0x0708 0 R/W FiL (Digital

LX

0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw

Fieldbus system Analog unit

0 to 10 V 0 to 5 V 0 to 20 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB -20No.EX-OMN0038-C Input signal range: -10

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Description MBF461 O-g~-1 Manifold block 0 , Terminal 0 , Metal joinVclamp O. 8. Plug-in type MBF4611-03-1 Gasket 8. 8. O-ring 0, 0. Receptacle ass'y 0 Manifold block ass'y MBF471*-g~-1 Manifold block 0. Metal jOint 0, 8. Gasket 6). 0 . O-ring 0.0 Non plug-in type MEF463LR-04-1 End plate (U) en> ,End plate (D) G) . Metal joint/clamp 0, 8. Plug-in type Gasket 6). 8.

Made to Order

(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -

V

0 0 0 / 2 0 0 0 / 3 0 0 0 P O R T P L U G S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 E X H P O R T S I L E N C E R PORT PLUG VVQZ100-CP (FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T H E R M A N

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0 !

Integrated Controller

0 5 10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load