(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.
Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.
04 ANA1-04 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 AN40-04 ANA1-04 SRF ITV Note 1) In the case of options GN, two pressure gauges and one silencer are included in the same container as accessories.
Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.
Example) AF30-03BD-CR-A q r t w e q Symbol 20 30 40 Body size Description Nil N Note 1) Rc NPT G F Note 2) Thread type w + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Port size e + Nil B Note 3) Mounting a Without mounting option With bracket Option Semi-standard + r Nil C Note 4) D Note 5) Float type auto drain b Without auto drain N.C.
VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03
Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04
Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04
0 20 40 60 Particle diameter m or less Operating temperature C 5 Clean One-touch Fittings Series KPQ/KPG How to Order KP H 06 KP P 08 Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Thread connection Tubing (rod) connection Specifications 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/
V 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.
, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5
Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer
A, B port size 04 4 stations Nil Rc M5 x 0.8 M5 : : F G 4 One-touch fitting C4 12 12 stations P port R port N NPT CE-compliant 5/32" One-touch fitting N3 1/8 1/8 T NPTF Nil Q CE-compliant EX510 Gateway-type Serial Transmission System [Option] Type 21SA (5 port/Body ported) How to Order 10 SS5YJ3 21SA 04 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure
Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2
Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2
Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5
LS + Stroke ZZ + Stroke 30 8.5 54.5 4 16.5 54 71 40 11 70.5 5 22 66 86 45 13 82.5 5 22 82 106 55 14 101 5 28.5 Rod side flange style: CG1FQ 100 125 65 16 121 7 30 120 150 Other dimensions are the same as basic style.