VQ7-6/7-8

Note) When ports are mixed, indicate piping specifications using the instructions and manifold specification sheet on pages 33 and 34.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs 12 Auto switch 24.5 34 SMC AUTO SWITCH SMC AUTO SWITCH A 49 A 33 6.5 B D-G5, D-K5, D-G5W, D-G5BA, D-K9W, D-G59F, D-G5NT D-A44 12 Auto switch Approx. Hs 36 Approx.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (tool required) B: Slotted locking type (tool required) 4 1 5 (R1) 3 (P)(R2) 1 (P) 5 (R1) 3 (R2) 2 Bore 6.1 Bore 6.1 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 PUSH TURN LOCK 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note) See page 33

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Thermo-chiller/Rack Mount Type

Option 1 (pp. 32, 33) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T1 Inverter pump mounted Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) When multiple options are combined, indicate symbols in alphabetical order.

Air-hydro Unit

286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data 1169 Air-hydro Converter CCT Series How to Order CCT 63 100 CE-compliant Nil Q CE-compliant (Refer to Table 1.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Size Size 15 20 30 40 15 20 30 40 Thread Shaft type Q1 = M Q1 = M K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1= M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 11-2-33 33 Series CRB2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 -XC1 to XC7, -XC30 Shaft type W Standard

High Power Cylinder:

REC Symbol Absorbed Energy/Cushioning Stroke RHC Bore size (mm) Max. absorbed energy (J) Effective cushioning stroke (mm) MTS REF 7 80 20 CC 12 80 25 21 80 32 33 80 40 OUT IN Theoretical Force (Unit: N) Piston area (mm2) Operating pressure (MPa) Operating direction Bore size (mm) Rod size (mm) 0.7 0.8 0.9 0.3 0.4 0.5 0.6 0.2 1.0 220 251 283 94.2 126 157 188 62.8 314 314 OUT 10 20 165 189

Table of Contents

(mm) Size Size 15 20 30 40 15 20 30 40 Thread Shaft type Q1 = M Q1 = M K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1= M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 11-2-33 33 Series CRB2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 -XC1 to XC7, -XC30 Shaft type W Standard

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Size Size 15 20 30 40 15 20 30 40 Thread Shaft type Q1 = M Q1 = M K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1= M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 11-2-33 33 Series CRB2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 -XC1 to XC7, -XC30 Shaft type W Standard

CC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) No load No load Load ratio Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

Vacuum Pad: Ball Joint Type

-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F 10-0-A10 (With buffer/One-touch fitting) ZPT F 10-01-A14 (With buffer/Female thread) Applicable tubing O.D.

Table of Contents

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

C95Series

lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

Compact Vacuum Unit

Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting