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Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

When the controller is turned ON next time, the default value (January 1st, 2000. 00:00:00) will be set. Therefore, set the date and time again. -13No. JXC-OMU0026 (a) Change to remote mode Change the mode to remote mode in the main window. When the mode is changed to the remote mode, the motors of the connected actuators will turn ON.

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

._3d_items_collection = {}; } SMC AN110-01 muffler 1/8 pt, AN SILENCER $4.20 + Add to Quote Add To Cart Add to Cart SMC ARB250-00-A interface reg a side, VS7-6 SOL VALVE 4/5

The example at right shows a time switch that will turn OFF on July 14th, 1999 at 9:00 AM (Note 9:00 PM is designated on the 24 hour clock as 21:00). The day of the week is automatically updated when the date is changed. The time switch can also be programmed to perform on a yearly basis.

: (978) 326-3700 Russia Phone: 812-118-5445 Fax: 812-118-5449 Finland Phone: 09-8595-80 Fax: 09-8595-8595 Windsor Phone: (519) 944-0555 Fax: (519) 944-1870 New Jersey Phone: (908) 253-3241 Fax: (908) 253-3452 Charlotte Phone: (704) 597-9292 Fax: (704) 596-9561 Philippines Phone: 02-663-1800/6630126 Fax: 02-663-1853 Slovakia Phone: 02-444-56725 Fax: 02-444-56028 France Phone: 01-64-76-10-00

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

PB 101 to 47.9 kPa Pilot Solenoid Valve Specifications JIS Symbol (Vacuum pilot type) Valve type Type 6A to 25A 32A to 50A, 32F to 50F V0301-00 Port size Pilot solenoid valve SF4--23 N.C. Normally closed N.O.

(Full span) Class 3 0 to 50C Housing: Polycarbonate/ABS resin Operating temperature range Material Port exhaust JIS Symbol Standard P V 13-7-5 6 Series ZL Option Specifications With digital vacuum pressure switch (ZSE4) Digital Vacuum Pressure Switch Specifications ZSE4-00---X105 ZSE4B-00---X105 ZSE4E-00---X105 Part no.

l 250 225.5 305 256.7 428 323.5 21775 1089 100 340.2 390.5 390.8 352 476.2 669.2 505.s 34020 l70l Table. 6.17 Mass in kg tor cylinders trom 25 to |00 mm Dia. for a Load Ratto ot 85olo wilh 5 bar working pressure. P E E D C O N T R O L The speed of a cylinder is delined by the extra force behind the piston, above the torce opposed by the load.

7 POM o POM Valve seat (B) 5-6-36 5 Port Mechanical Valve Metal Seal Series VZM400 Series VZM400 Basic VZM450-01-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) SA VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2.0 mm O.T. 2-3.5 mounting hole 3.0 mm T.T.

Gripping force accuracy: 25% (F.S.) 50 35 30 Pushing force 100% Gripping force F [N] Gripping force F [N] 40 Pushing force 100% 25 30 20 70% 70% 15 20 40% 40% 10 10 5 00 50 100 150 200 250 00 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] Selection of Pushing Speed Set the [Pushing force] and [Trigger level] within the range shown in the figure below.

0 0 [50 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS012-A-20/HRS012-W-20 (Single-phase 200 to 230 VAC) 2500 2500 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Cooling capacity [W] Cooling capacity [W] 2000 2000 25C 25C 1500 1500 32C 1000 1000 32C 500 500 40C 40C 00

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*00 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS

Gasket for 10-32UNF: M-10/32G 01 03 05 07 09 11 13 Metric Size Uni A 05 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D. One-touch fittings Symbol Size Same diameter tubing Same diameter rod 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Symbol Model Model 00 99 01 03 05 07 09 11 13 Tubing (Rod) connection Different dia.