FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

S070 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC M plug connector (M) 1.3 1.7 (A) 2 VQ M plug connector (M) VKF 1 (P) 3 (R) N.O. Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling.

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Body Size: Applicable AC Size: AC30, Handle Operation: Single Action, Thread Type: Rc, Port Size: 3/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: Rc, Port Size: 3/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Double Action, Thread Type: Rc, Port Size: 3/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: Rc, Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: Rc, Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: W (Double Action), Thread Type: Rc, Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

Process Pump

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OY printing OY 7150SZ Printed in Japan. D-DN

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7