3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ300 Body width 18 mm One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 C4 C6 C8 C10 M5 02 Type of actuation 1 2 3 4 N.C., Metal seal N.O., Metal seal N.C., Rubber seal N.O., Rubber seal Note) For the inch-size One-touch fittings, refer to page 4-14-18.

F/ISE

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

ARM10/11

-4-34 to 14-4-38.

ARM10/11

-4-34 to 14-4-38.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C10: One-touch fittings for 10 60.5 2-4.5 Mounting holes 02: Rc(PT)1/4 41.8 22 2-3.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 Cover dia 1.6 Cross section 0.34mm2 2 46.5 R3 28.6 7.1 Manual override M5 X 0.8 External pilot port 10.5 (C6, C8) (Only exterminal pilot style (R)) 38.5 17.5 (C10) (02) 2-M2.5 X 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 2-3.4 Mounting holes 4 36 9 6.5 6.5 47.5

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

VP300/500/700

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With gasket and mounting screw) VP700-25-1A VV3P7 VP500-25-1A VV3P5 How to Order VV3P 1 04 41 02 3 Series VP 3 port solenoid valve Manifold Thread type Nil F N T Rc G NPT NPTF VV3P5-42-053-03 Body size standard 3 5 standard 1 4 3 8 standard 7 1 2 Port size Symbol Port size 02 03 04 Applicable manifold base model 1 4

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R 13 11 0.5 10 5 5 1(Bleed port) 210 10 7 7 1(Bleed port) 228 5-M3 0.5 (Piping port) 5-M5 0.8 (Piping port) 3 Position closed center / exhaust center / pressure center : SYJA3 20-M3(-F) 3 Position closed center / exhaust center / pressure center : SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 0.5 (Pilot port) 1.8 10 4 A B 1.5 8.2 7 19 (Mounting holes) 3.2 22-M3 0.5 (Pilot port) 22 3 49 2.5 (Mounting

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

SYJA3000

01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center 01 02 SYJA7540Note1) P, A, B port: Rc(PT)1/8R1, R2 port: Rc(PT)1/4 Note2

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

AC

Panel Mount Nut Applicable Body Size All All 30, 40 30, 40 All Symbol 02 03 04 Port Size 1/4 3/8 1/2 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Series AC Epoxy Coated F.R.L.

Panel Mount Nut Applicable Body Size All All 30, 40 30, 40 All Symbol 02 03 04 Port Size 1/4 3/8 1/2 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Thermo-chiller

-W-m +HRL-JK001 G1/2 G1/2 G1/2 G1/4 G3/8 G3/4 HRL-EP018 NPT thread conversion fitting set NPT1/2 NPT1/2 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP011 G thread conversion fitting set HRLE090-A-m +HRL-JK001 G1 G1/2 G1/4 G3/8 G3/4 HRL-EP012 NPT thread conversion fitting set NPT1 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP013 G thread conversion fitting set HRLE090-W-m +HRL-JK001 G1 G1/2 G1/2 G1/4 G3/8 G3/4

SYA3000/5000/7000

5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order One-touch fitting (Inch size) A, B port size Thread type Thread piping Rc Nil Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 M5 x 0.8 One-touch fitting for N NPT SYA3000 1 8 1 4 Except for M5 1 4" One-touch fitting for NPTF T 5 32" One-touch

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following

VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5

AR Series Modular Type Regulator

Applicable Model Model AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 A 30 AR q X406 03 0.4 MPa setting w t e r Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.