HRX-OM-R016

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-R016 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

NAAMS Standards Compliant

E E F G H G H I I J K L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F

MHL2

) (mm) A B C D E F G H 38 54 72 J 80 108 146 Model MHL2-10D MHL2-10D1 MHL2-10D2 36 52 70 51 67 85 26 42 60 56 78 96 76 118 156 100 142 180 24 39 57 Note 1) J dimension is at fully closed.

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Cylinder with Lock

Thread depth MC V B C With rod BH2 BH1 BH3 E E C (BY) C B C L BZ BN F BY F [mm] Model Applicable rod size B BH1 BH2 BH3 BN BP BY BZ C E F GA GC GF J KC MC V 32 12 f8 46 23 38.5 46.5 59 1/8 16 101 32.5 30 13 37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5

Cylinder with Lock

Thread depth MC V B C With rod BH2 BH1 BH3 E E C (BY) C B C L BZ BN F BY F [mm] Model Applicable rod size B BH1 BH2 BH3 BN BP BY BZ C E F GA GC GF J KC MC V 32 12 f8 46 23 38.5 46.5 59 1/8 16 101 32.5 30 13 37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5

70astamb1

h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.

mb1

MM 2-RcP G G MM D D e e Effective thread Effective thread 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

Prevents Micro-Bubbles

B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2 J K L M N P Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1

Vacuum System Peripherals:

length 0.6 m L Grommet type Lead wire length 3 m 24 VDC 5 12 VDC 6 C Lead wire length 0.6 m 1 Symbol 2 3 4 5 6 7 8 Order of manifold (Station) Connector type 6 VDC V CL CN Lead wire length 3 m Without connector 5 VDC S 05 07 10 Ejector unit nozzle diameter 3 VDC R Note) When F is required, it is Nil.

IDU/IDF

8 Compressed air inlet Inspection grill Rc 3/8 G Ventilation air inlet C Ventilation direction F [100VAC specification] Power cord (900) [200 to 240VAC specification] Terminal block J 63 L 20 Drain tube K H 4-13 [200 to 240VAC specification] Power cord outlet Model Port size A J B C D E F G H K L IDU3D IDU4D 246 496 509 87 125 344 23 175 151 206 356 44 67 Rc 3/8 242 591 606 31 170 469 13

Square Tube Type Air Cylinder Series MB1

Nil S 3 n Built-in magnet Mounting bracket Basic type Foot type Flange type B L F Type of auto switch Nil Without auto switch Select an applicable auto switch model from the table below.

MHL2

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

MGP

circuit Z80 No 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P. 60 2 wire Y59B Y69B 12V 3 wire (NPN) Y7NW Y7NWV Solid state switch IC circuit 5V 12V Diagnostic indication (2 color indicator) Relay, PLC Grommet Yes 24V 3 wire (PNP) Y7PW P. 61 Y7PWV Y7BW Y7BWV 12V Water resistant (2 color indicator) Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

53

L/min 20 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc1 (Symbol F: G1, Symbol N: NPT1) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Pump capacity Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Carbon, Ceramic, PE, PVC, POM, PTFE, NBR, EPDM, FKM, PP Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230