MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

Series SV

/4000 How to Order SV W1 00 1 1 5 U D Series Thread type 1 2 3 4 SV1000 SV2000 SV3000 SV4000 Rc G NPT NPTF Nil F N T Type of actuation 2 position single solenoid Port size (A) 4 (B) 2 Applicable series Port size Without sub-plate Symbol Nil 01 1 SV1000 SV2000 SV3000 SV3000 SV4000 SV4000 1/8 5 (EA) 1 (P) 3 (EB) Pilot specification 02 1/4 2 position double solenoid Nil R Internal pilot External

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note 2) Use 1/8" tube. Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

Free Mount Cylinder

Port size 2-M5 x 0.8 [32: 2-Rc 1/8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16

VQ7-6/7-8

S D Single Double How to Order Sub-plate VS7 2 A03 Specifications Thread type Port size Porting specifications Rc Nil A03 A04 A06 B03 B04 B06 Side ported Rc 3/8 Side ported Rc 1/2 Side ported Rc 3/4 Bottom ported Rc 3/8 Bottom ported Rc 1/2 Bottom ported Rc 3/4 Model Weight (kg) NPTF T G F Piping location Port size VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04 VS7-2-B06 3/8 1/2 3/4 3/

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CY1

B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

Modular Type Filter Regulator Series AW

to Order 03 BG 30 AW F 2 N X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

15

x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70 50 4.6 10.6 60 M3 x 12 M4 x 12 11 NT 2 x M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 M4 x 12 12 NM2 M4 x 0.7 8 50 38.2 11.5 60 7 M3 x 12 M4 x 12 10 32 NZ 4 x M5 x 0.8 8.5 70 50 4.6 11 60 M4 x 12 M4 x 12 14 NY 4 x M4 x 0.7 8 70 50 4.6 11 60 M4 x 12 M4 x

JIS Standard Hydraulic Cylinder

stroke A A K F GA F MA 2 x Rc P GA MA R CHN J CHM MM MM RR CHS TDe9 D E D E CH2 CH2 Width across flats G Width across flats G CHA C NA T M NA T TT Air release Air release B Related Products H + Stroke H S + Stroke TY 0.3 TY 0.3 TX ZZ + 2 strokes TZ D(mm) Bore size (mm) Stroke range (mm) B C SS GA M F J TX P NA R RR TZ T S TDe9 TT TY 32 39 2 158 113 20 28 58 20 25 to 800 M10 x 1.25 11 11 32

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, EPDM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -