MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

SMC

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 134 MXS Air slide table 1322Dimensions: MXS6 13221322Axial piping type (6): MXS6-P Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

HRX-OM-Y098

6.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Back page 6

CRB2/CRBU2/CRB1

X D1 Y-1 2 to 8 3 C1 L1= 10 15 X-3 4 to 14 3 3 to 9 Y-1.5 3 to 4 C2 Y = L2 = 15 20 5 to 18 X-4 3 to 4 3 to 10 Y-1.5 3 to 5 X = D2 = 20 30 6 to 20 X-4.5 3 to 5 3 to 13 3 to 6 Y-2 C2 = C 30 40 6 to 22 3 to 6 X-5 6 to 15 3 to 8 Y-4.5 Symbol: A7 Symbol: A8 The long shaft can be further shortened by machining it into a stepped round shaft with male threads.

HRX-OM-W060

6.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

6 10 6 6 15 10 8.5 8.5 17 17 17 17 15 45.5 45.5 4-Rc(PT)1/8 (Piping port) 24 24 32 4-Rc(PT)1/8 (Piping port) 32 [ ] for AC Other dimensions are the same as the grommet style

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

VZ100/300/500

to page 4-6-46.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

6 Component Parts Component Parts No.

Compact Manifold Regulator

Metric size Inch size Stations Symbol Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Mechanical Valves Series NVM, NVFM, NVZNI

in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40)

IIIIIII

in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40)

SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.