HRX-OM-M090

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

HRX-OM-W060

. 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-10 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300

24

1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

13

43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body ported type (Without silencer) 88 53 3 8 3 8 Supply

Table of Contents

8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Axial ported CRQ2 Mounting Basic style, Foot style Size: 80 Size: 100 MSQ Volume MRQ (cm 3) Size: 50 Rotating angle Single vane (S) Double vane (D) DClassification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 90 30 70 88 186 48 98 136 272 20180 49 94 138 281 Standard 270 66 118 188 376

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.4 1.8 2.5 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.0 1 6.0 1

Rotary Actuator

8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10 19.5 22.8 12.8 10 D2 H Connection threads 8 15.2 18 26 21.5 26.3 12 M (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 H 17 20.9 12

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Metric size Inch size Model Port size 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" ASD230FG-M5 M5 x 0.8 ASD330FG-01 R 1/8 ASD430FG-02 R 1/4 ASD530FG-02 R 1/4 ASD530FG-03 R 3/8 ASD630FG-04 R 1/2 ASD230FG-U10/32 10-32 UNF ASD330FG-N01 NPT 1/8 ASD430FG-N02 NPT 1/4 ASD530FG-N02 NPT 1/4 ASD530FG-N03 NPT 3/8 ASD630FG-N04 NPT 1/2 Specifications Fluid Air Symbol Proof pressure 1.5 MPa Max. operating

Direct Operated

/N.O. 1/8 to 1/2 2 to 10 10 to 50 N.C.

Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For detailed specifications, refer to page 8-30-1.

S Couplers

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

HRX-OM-Z002

high pressure switch (When AL65 occurred) . 7-6 7.4 OTHER ERRORS . 7-8 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 QUALITY CONTROL OF CIRCULATING FLUID AND FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during