Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

MY1

MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

EXxx-OMN0029CN

1 2 3 4 5 6 7 / byte1 Bit No. 0 1 2 Reserved 3 () 4 () 5 6 7 byte2 Bit No. 0 Reserved : : 7 Reserved byte3 Bit No. 1 0 1 1 2 2 2 3 4 SI 5 Reserved 6 Reserved 7 Reserved 1Bit0 1 ON 2Bit2 3 ON -63No.EX-OMN0029CN-D byte0 Bit No. 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 byte1 Bit No. 0 8 1 9 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -64No.EX-OMN0029CN-D

IZN10_C

7 7 7-2. 2. 2. 2. 22 22 22 22 -2- 1. 1. 1. 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

240

1 t !

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

ZX

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

70pvpump

Panel mounting possible Selectable pressure unit Panel mounting possible Selectable pressure unit Auto shift function Compound pressure Selectable pressure unit R thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-41

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Sine Rodless Cylinder Series REBR Direct Mount Type

27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z