5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

16 16 SOL.A SOL.A SOL.A 15 15 15 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 Triangle

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

CXWM/CXWL

Table (2) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDBXW 10MM L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L 1 1 1 1 Magnet mounting block ass'y Aluminum alloy 1 1 1 1 1 Aluminum alloy Switch mounting rail 2 Spacer Mounting block

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

MY1

head cap screw Hexagon socket button head screw Rodless cylinder Seal guide A Seal guide B Slide plate Spacer Hexagon socket head cap screw Side seal unit MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A MYMK-16-A Nickel plated Seal list 20 No. 12 13 14 15 16 17 18 19 20 Qty. 1 1 2 2 2 2 2 4 2 Description Material 16 25 32 63 40 50 MY20-16A-Stroke Seal belt Dust seal band Scraper Piston seal Cushion

VQ4000

station (2) 16 16 stations Note 1) When two or more symbols are specified, indicate them alphabetically.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

44

O.D. 1/8" (3.18) 0.086" (2.18) KFG2H0122-00 7 1.1 8 21.8 5 1.5 8 2 x Applicable tubing H1 H2 H2 0.098" (2.5) 5/32" (4) KFG2H0325-00 7 1.6 8 21.8 5 1.8 8 d 1/4" (6.35) 5/32" (3.95) KFG2H0704-00 16 6 12 25.2 6 3.3 12 5/16" (8) 0.236" (6) M L M KFG2H0906-00 25 17 14 28.6 6.6 5.3 14 3/8" (9.53) 1/4" (6.35) KFG2H1163-00 45 19 17 33.6 7.6 5.6 17 1/2" (12.7) 3/8" (9.53) KFG2H1395-00 55 51 19 37

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

A larger range of work piece sizes can now be accommodated. 100 M2 m1 200 Allowable moment (Nm) Load weight (kg) 50 100 0 16 25 40 0 16 25 40 Bore size (mm) Bore size (mm) (kg) Load weight (for m1) Allowable moment (for M2) (Nm) MY1H MY2H MY2HT MY1H MY2H MY2HT Bore size mm Bore size mm Series Series 25 40 16 25 40 16 MY2HT MY2H MY1H MY2HT MY2H MY1H 20 15 38 32 80 62 55 120 220 6 26 50 10.8

Plug-in Unit

to 2 stations (4 stations) 1 to 12 stations (16 stations) 1 to 8 stations SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations) AS-i, 8 in/out, 31 slave modes, 1 power supply systems 1 to 4 stations (8 stations) (16 stations) Serial kit for PROFIBUS-DP Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK AS-i, 4 in/out, 31 slave modes, 1 power supply systems 1 to 2 stations (4 stations) 2-2-

Digital Flow Switches Series PF2A

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

MU

, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63

JXCx-OMT0001CN

(1) (9) (10) (2) (3) (4) (15) (16) (7) (11) (8) (12) (5) (17) (18) (21) (19) (6) (20) (13) (14) OFF 1 PWR LED() ON 2 RUN LED() EtherNet/IP USB USB 3 USB USB LED() USB 4 ALM LED() 5 USB USB ) (+)(-) 6 C PWR (2 ) x100 7 x10 IP x1 x10 x100 IP 4Byte x1 8 MS, NS LED EtherNet/IP 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+) 1 (+) 1 (+) 13 CI 1 2 2 (+)2 (+

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in