High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L (A) N LQ2H21-M LQ2H22-M LQ2H23-M LQ2H24-M LQ2H31-M LQ2H32-M LQ2H33-M LQ2H34-M LQ2H35-M LQ2H36-M LQ2H41-M LQ2H42-M LQ2H43-M LQ2H44-M LQ2H51-M LQ2H52-M LQ2H53-M LQ2H54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 W 39 1/8" 42.5 19 19.9 16 18 VC 36.5 1/4" (M) H VDW 49 43 (E) H 1/4" Class 2, 3 48.5 42.5 VQ R (NPT) Port size 22 26.2 24 24 49 42.5 3/8" VX2 48.5 59 58 59 58 68 67 68 67 42

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

1.7 4.5 3 4.5 67 1.7 P=11 15.5 Mounting hole for M2.5 5.5 (30) 38 (14) 46.5 8 3.5 32.2 33 Residual pressure release manual override DIN rail clamp screw 11 Residual pressure release manual override 29.5 (17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 2n-C3, C4, C6, M5 C3: One-touch fitting

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

Air Cylinder Series CM2

301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size 20 36 30 19.2 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 48 61 73 86 111 136 161 25 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 32 19.2 72 85 97 110 135 160 185 32 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 32 19.2 72 85 97 110 135 160 185 40 12.5 25 37.5 50 75 100 125 54 67

Compact Cylinder with Air Cushion and Lock Series RLQ

CNS 9 76 89 4 x 6.6 18 38 49.5 + Stroke CLS 105.5 + Stroke CLQ RLQ 43.5 Rod end nut MLU Head flange style: RLQG50 MLGP ML1C 67 50 9 8 76 89 4 x 6.6 38 49.5 + Stroke 104.5 + Stroke 33.5 Rod end nut Double clevis style: RLQD50 7 Cap bolt 4 x M6 x 1 Hole: 14 H10 Shaft d9 20 +0.4 +0.2 22 28 8 38 49.5 + Stroke 14 44 -0.1 -0.3 123.5 + Stroke D137.5 + Stroke -X Refer to page 857 for details of

Basic type / Direct mount type Series CY3B/CY3R

B Counter bore depth C T Y HP 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85

Mechanically Jointed Rodless Cylinders

can be loaded directly on the work table due to the integrated guide. 0 0 16 25 40 63 16 25 Bore size (mm) Bore size (mm) 40 63 Height (H) reduced by 36% at the maximum Overall length (Z) reduced by 140 mm at the maximum MY3A (with rubber bumper) Height (H) Height (H) MY1B MY3A/3B MY3M MY1M MY3B/MY3M (with air cushion) Height (H) (mm) 16 25 40 63 Series 20 32 50 MY3A MY3B MY1B 37 45 54 67

Pilot Operated

.): VXD2130 Conduit: C Grommet: G (67) (52) 19.5 Approx. 300 19.5 (52) (67) I Approx. 280 I G1/2 (5.5) (1.6) (1.6) (5.5) H D E (A) (32) H (7.5) (7.5) Bracket G G (A) OUT IN OUT IN E (28) 50 C B 2 x Rc 1/4, 3/8, 1/2 Bracket (28) 50 B C 2 x Rc 1/4, 3/8, 1/2 40 F 40 F DIN terminal: D Conduit terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1

Guide Cylinder Series MGG

or more M6 x 1 depth 9 1/8 12 12 26 12 82 48 40 39 71 157 14 79 250 to 400 125 st or more M6 x 1 depth 13 1/8 12 12 31 13 100 57 46 46 71 175 14 79 350 to 500 150 st or more M6 x 1 depth 13 1/8 12 12 38 16 114 65 52 46 73 201 14 81 350 to 600 200 st or more M8 x 1.25 depth 16 1/8 13 12 47 20 138 84 62 56 80 238 15 89 350 to 800 250 st or more M10 x 1.5 depth 21 1/4 14 14 58 25 164 94 75 67

Air Slide Table Series MXS

Axial piping type (20) MXS20-P Max. 11.5 Operating port 2 x Rc 1/8 (NPT1/8, G1/8) 30 (mm) J 68.5 68.5 68.5 78.5 93.5 132.5 185.5 239.5 291.5 Model MXS20-10R MXS20-20R MXS20-30R MXS20-40R MXS20-50R MXS20-75R MXS20-100R MXS20-125R MXS20-150R 65.7 32 15 D29.5 -X Other dimensions are the same as the basic style. 20 Individual -X Other dimensions are the same as the basic style. 67 Series MXS

LEC-OM069xx

From completion of latching to transmission of a response: One com29 munications cycle max. 8-67 8 MECHATROLINK-II Commands (2) Related Parameters The parameters related to the execution of LATCH command are listed below. Parameter No.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Hydraulic Cylinders

H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67

Single Axis Electric Actuator Serriies LJ1S Slider Guide

20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 140 184 176 Z section detail 52 52.5 169 18 22 175 162 Stroke + 178 (table movement range) Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 92 8-6.6

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

MXS Series Air Slide Table

Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric type) .pages 67

Digital Flow Switches Series PF2A

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 12 to 24 VDC UP 2 + White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Compact Cylinder with Air Cushion and Lock Series RLQ

0.8 Dust cover (Manual unlocking unit) PL unlocking port Unlocks when pressurized Rod end male threads M18 x 1.5 11 26 Rod end nut 28.5 33.5 9 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/50 (Emergency Stop) Foot type/RLQL50 18 38 49.5 + Stroke Special cap bolt 78 39 5 14.7 8 3.2 8 14.7 4-9 79 95 113.7 + Stroke 64.5 + Stroke Rod end nut 43.5 Front flange type/RLQF50 67