Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

COQ2BP

AI, "'~1:;;' Proof pressure 217 PSI (1.S3kgt/cm2) Switch mounting bracket: 1 pc. . :'( Switch mounting screw: 2 pes. Maximum operating pressure 145 psi (10.2kgf/crnZ) Ambhtnt and fluid temperature 41 140"F (5 60"C) (M3xO.Sx16L) D-P7 BOPt Switch mounting bracket screw 2 pes. D-PS 050 (M3xO.5xI 4L) Lubrication Non-lube Support typo Standard Switch mounting nul: 1 pc.

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Low torque Metal seal type Rotary joint

MQRF2-M5) * flange: MQR12-F (for MQRF12 M5) * 45 * 37 0.03 4.5 * 4-3.5 mounting hole * 4-3.5 mounting hole 3 +0.1 0 depth 10 2-M3 x 0.5 thread length 6 P.C.D.29 44h8 (10 from end) 35h8 (10 from end) 20h8 8.2 x 3 = 24.6 P = 8.2 2 70 *5 (55) 13 15h8 4-M5 x 0.8 10 counter bore depth 1.5 50 2 8.2 26 1 2 (34) 1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

CL

1 !2 !3 !4 !5 !6 !7 No.

Dedicated Controller Series LC1 Uniaxial Type

ALARM (24) Alarm output 2 NO.1 12 General-purpose input NO.2 COM (12, 25) Common The output terminal common. 3 < 1 > NO.3 13 NO.4 4 NO.5 14 5 NO.0 15 6 NO.1 16 < 2 > 7 NO.2 17 General-purpose output 8 NO.3 18 9 NO.4 19 10 NO.5 20 57 Series LC1 Series LC1 Timing for temporary stop during operation Timing for READY signal generation immediately after turning on power HOLD ON OFF ON OFF Power

α PneuAlpha HARDWARE MANUAL

Protection IP 20 Certications CE, UL/cUL Certications TV (AL-10MT-D, AL-10MR-D) Description Specication UL 508 EN60730-1 EN61010-1 EN50081-1 EN50082-1 EN50082-2 10 3.

Coolant Valve

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Symbol Electrical entry Flange Values in parentheses are N.C. at 1 MPa.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

No. 1 2 3 4 5 Note Material Aluminum alloy Aluminum alloy Aluminum alloy EP Description TSUBAKI CABLEVEYOR Cable side cover Mounting plate Cable flange End cap Construction Precautions on handling of the TSUBAKI CABLEVEYOR 1.

Refrigerated Air Dryer

40 45 50 55 60 2 to 25 30 32 35 40 45 1.1 1.1 1.30 1.41 1.06 1 1 1.25 1.16 1.21 1.02 AMF 0.91 0.97 1 1 1 1 0.83 0.89 0.83 0.8 0.92 0.99 ZFC 0.79 0.77 0.7 0.64 0.75 0.98 0.6 0.48 0.63 0.92 SF 0.53 SFD Data C: Inlet Air Pressure Data D: Air Flow Capacity LLB Inlet air pressure (MPa) Inlet air pressure (MPa) Air flow capacity (m3/h [ANR]) Correction factor Correction factor Model IDFA3E IDFA4E

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44

VNB

LVH VNB1 VNB12 1 4 12 (P1) 12 (P1) LVD External pilot solenoid Valve Specifications LVQ Fluid Water/Oil/Air/Vacuum, etc. 5 to 60C (1) 2 (B) 1 (A) 2 (B) 1 (A) VNBA Fluid temperature LQ 5 to 99C (1) (Water, Oil etc.

AN

105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 Note) NPT thread is also available.

With Factory Installed

AW200 1-300 1-400 1 Standard S ecifications Model AW2001 AW3001 AW4001 Port size 1/8,1/4 1/4,3/8 1/4,3/8,1/2 Proof pressure 1.5MPa !15.3kgf/cm2) Max. operating pressure 1.0MPa 110.2kgflcm2) Set pressure range 0.05~0.85MPa 10.51 ~8.7kgflcm2 ) Ambient and fluid temperature -5~60"C (Prevent freezing) Filtration degree 5,t.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

76

F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 D2 L2 A 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

Pneumatic Transfer System Series MF

A Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Aluminum alloy Brass Rolled steel plate Rolled steel plate Rolled steel plate Rolled steel plate Rare earth magnet Rare earth magnet Stainless steel Aluminum alloy Urethane rubber Carbon steel 1 2 1 2 2 2 4 2 4 2 5 5 1 2 2 4 2 2 2 2 2 2 2 2 2 2 4 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 Anodized Anodized