25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting
Specifications Suction Flow Rate of Vacuum Type (Reference values) Bore size (mm) Item 10/16 1 Size Suction flow rate L/min (ANR) 10/16 1 MPa 0.7 MPa Proof pressure Max. operating pressure Min. operating pressure 0.08 MPa (Air cushion 0.1 MPa) Mounting Bracket / Part No.
Applicable load Lead wire length (m) Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Grommet Reed auto switch Yes 12 V 24 V 2-wire Note 1) Lead wire length symbols: 0.5 m Nil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ
E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .
8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88
0 1 "12h" 48 5th shift 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 0 0 49 6th shift 0 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 0 50 7th shift 0 0 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 51 8th shift, ExOR A001h 1 0 1 0 1 1 0 1 1 0 0 1 1 0 1 1 1 52 Load 6th byte "34h" 0 0 0 0 0 0 0 0 0 0 1 1 0 1 0 0 0 53 ExOR step 51 with step 52 1 0 1 0 1 1 0 1 1 0 1 0 1 1 1 1 0 54 1st shift, ExOR A001h 1 1 1 1 0 1 1 0 1 1 0 1 0 1 1 0 1 55
to 8 (16) 1 to 4 (8) S D side 1 to 8 (16) 1 to 4 (8) 1 to 8 (16) Note 1) Separately order the cable assembly for type 20P P kit.
0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1
-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 (H) 28.5 57 34.5 69 103 16.5 137 N 28.5 57 34.5 69 108 22 151 M 42 84 48 96 165 25 202 42 84 48 96 175 32 236 J 21.8 K 37 L 5 M 7 N 15 Q 21 Y 55 Model LVQH20S-Zm-1 LVQH30S-Zm-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 C B A D 32 50 6 7 20 25 80 1/46 1/46 37.5 55.5 6 7 20 25 80 50.2 78.2 10 7 20 38.5 110 60 88 10 7 20 38.5 110 Multi-turn type (with indicator
8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9
0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.
0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1 1 0 1 61 1 1 1 1 0 1 62 1 1 1 1 1 0 62 1 1 1 1 1 0 63 1 1 1 1 1 1 63 1 1 1 1 1 1 37 - 6.4 Parallel I/O Wiring Example When you connect a PLC, etc. to the CN5 parallel I/O connector, please use the I/O
17.6 169.9 98.4 88.0 931.1 1 46 55 -12M R 1 1/4 1012.9 100.4 87.7 MQR KKA9S-10M R 1 22.0 264.9 1680.7 125.5 115.1 -12M R 1 1/4 1758.1 127.5 114.8 1 1/4 63 69 25.1 344.9 T -14M R 1 1/2 1819.4 127.5 114.8 Female thread type (mm) Body size H Width across flats Min. bore size Model T Connection port size Mass g Effective area mm2 D L KKA3S-01F Rc 1/8 37.6 46.9 17 -02F 1/8 Rc 1/4 18.5 18.5 5.9
3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.
3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.
Pg9 6 to 8 1/4 2 x 1/8 (External pilot port) Pilot EXH 2 x 8.5 (Mounting hole) EXH 221 230 PE PA 137 144 128 118 85 78 OUT IN EXH 55 55 25 4 1 1 / (EXH port) 36 36 82.6 4 1 2 x / , 1, 1 / 4 3 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.
79 [83.4] 91.9 [96.3] 1 55 109.7 82 94.9 (Lead wire length) Approx. 300 59.6 [66.6] Approx. 300 (Lead wire length) 48.4 [55.4] 33.1 Refer to page 1-5-79 for dimensions with connector cable.
Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (Series T,TIA) Note) Stainless steel 4 1/2 Note) Soft nylon (Series TS,TISA) 1/8 2 Note) 1/4 Polyurethane (Series