A A1 E1 L1 MM RR1 U1 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 16 20 Y-G02 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 34 8.5 25 M8 x 1.25 10.3 11.5 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 20 I-G02 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 20 25 Y-G03 41 10.5 30 M10 x 1.25 12.8 14 20 25 I-G03 10 10 41 10.5 30 M10 x 1.25 12.8 14 10 32, 40 Y-G04 42 16 22 30 M14 x
53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)
0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion
10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40
25 5 5 20 20 25 16 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] 460 Model Selection MGP Series Horizontal Mounting Ball Bushing (19) L = 50 mm, V = 200 mm/s or less (20) L = 100 mm, V = 200 mm/s or less MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 20 25 20 5 5 20 16 20 Load mass m [kg] Load mass m [kg] 16 16 16 1 1 0.5 20 50 76 75
45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10
$2 are for 20 to 40.
D M5 M5 x 0.8 Nil Rc Rc 1/8 VZ344(A), 2(B) port F G 20 20 stations 1(P) port M5 x 0.8 N NPT VZ35Rc 1/8 Z NPTE Applicable blanking plate assembly DXT192-13-1A Applicable individual EXH spacer assembly DXT192-21-1A Applicable individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A),
Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25
(Refer to Specific Product Precautions 4 on the next page for details.) 1.5 01: R 1/8 T1: NPT 1/8 ZSE40(F)/ISE40 W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET R 6.5 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 For splash proof use (IP65), insert an air tube into the atmospheric release port.
20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25
Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT
55 175 20 8 25 Front flange type/MQMLF 6 20 33 42 27.5 2.3 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 5.5 2.3 33 20 42 28 65 101 10 5.5 2.3 42 24 54 30 74 114 16 7 4 60 34 75 40.5 97.5 151 20 7 4 60 40 75 44.5 102.5 160 25 15 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Refer to
DC24V 2. 20 3. 4. 5. 6. 7. 8.
weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20
-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.
W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !
QA F Q QB QU QW Bore size (mm) QW QU 29 32 40 50 38 42 50 13 13 16 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 (mm) A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 P M5 x 0.8 / / / / Q 17 20 20 24.5 24.5 T
$2 are for 20 to 40.