SMC Corporation of America
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-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

10 10 10 10 RLQ D-A59W 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

50 60 [mm] bCW 50mm 0 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 10 50mm CCW CW -40 -30 -20 -10 0 10 [mm] -10 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -33- LEC []/ LEC 12: CCW 1: CW 2: CCW 1 LEY*16**:100LEY*25**:100LEY*32**:100 LEY*16*A*150LEY*25*A*200 100 20 550 / LEY16* 535 / LEY25* 530 / LEY32* 1000 () 10 0 CCW CW / P.37 6.1 1 CCW CW 2 3 OFF ON -34- 5. / A

14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

0.3 Encoder Cable (Note 3) ETFE SVP 70/0.08 (AWG#22 or equivalent)-3P Ban-gi-shi-16824 LE-CSE-RB LE-CSE-RA 2 to 10 AWG22 6 (3 pairs) 70/0.08 56 or less 1.2 7.1 0.3 LE-CSM-SA 2 to 10 AWG18 4 34/0.18 21.8 or less 1.71 62 0.3 HRZFEV-A(CL3) AWG18 4-cores LE-CSM-SB 2 to 10 Motor cable LE-CSM-RA 2 to 10 (Note 5) AWG19 or less 1.63 5.7 0.5 (Note 4) RMFES-A(CL3X) AWG19 4-cores LE-CSM-RB 2 to 10

29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 89 Series CRBU2 Dimensions: 10 Double vane type Figures below show the intermediate rotation position when A or

50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 125.5 179.5 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 ZZ 80 80 80 92 112 158 212 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 Regarding

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YA 03 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 42 50 62 76 6 8 10 12 16 20 25 30 6.5 6.5 8.5 10.5 6.8 9 11 14 18 20 26 31 10 12 16 18 CNA Applicable air cylinder bore CNS 03 05 08 10 32, 40 50, 63 80 100 Mounting

Pg7 3.5 to 7 30.5 64.3 56.8 (AC) 53.1 46.1 (AC) 42 35 19.6 45.3 35.5 47.5 (AC) 30 37.7 (AC) 30 28 Series VF1000/3000 Dimensions (mm) VF3000 1/8", 1/4" [4(A), 2(B) port] 2 x 4.3 (For mounting) 25.5 10 Manual override 4A 1 26.4 20 2B 23 19 (1.6) 66.2 G: Approx. 300 H: Approx. 600 (Lead wire length) (6) 90.9 (AC: 93.1) (Indicator light) 55.5 (10) (E type) (AC) 38.6 42 (45) (55) 31.5 35 35 19.6

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

(Lead wire length) Max.10 11 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 2-position double L plug connector (L) 52-SY9220-L02 03 106 6.5 Insulation: Black () 18.4 2B 4A Manual override Insulation: Red (+) 33.6 3 x 3.2 (Mounting holes for manifold) 64.2 2 x 1/4", 3/8" {4 (A), 2 (B) port} 46 (For E type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 2 x 4.4 (Mounting holes) (12) 24.9 194.2