Aluminum High Vacuum Angle Valve Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
OPTIONS AND AUXILIARY EQUIPMENT (2) Outline drawing RAV-781BYZ-2 [Unit: mm] 1) 2) 3) 5.5 1 11 1 30 Black Black Black 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 0 200 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 4.2 0.2 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 28 1.0 41 1.0 11 28 12. SERVO MOTOR 12.
16 20 24 1/4, 3/8 3/8 3/8 3/8 0 REB 1,000 2,000 3,000 Maximum speed Vmax (mm/s) REC 40 8 10 1/4, 3/8 CY 500 40 6 =0.7 AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 30 CX 40 1000 1500 2000 2500 3000 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 12 18 24 30 36 0.5 0.1 0.3 20 MQ 10 RHC Note) Refer to page 1202 for maximum absorbed energy since cushioning ability
3.5 29 AC25-A 1/8 167.4 115.1 38.1 30 55.1 80 30.5 41 57.2 35 7 14 4 41 AC30-A 1/8 167.4 115.1 38.1 30 55.1 80 30.5 41 57.2 35 7 14 4 41 AC40-A 1/8 220.4 147.1 39.8 38.4 72.6 110 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-A 1/8 235.4 149.1 37.8 38.4 77.6 110 39.6 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl With Round type With
ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3
Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.
Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P
HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C type 20 to 40 D-H7C type 20 to 40 50 to 63 50 to 63 Approx. HS Approx.
Refer to pages 6-9-12 to 6-9-18.
ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3
11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6
n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 80 90 85 10 D-M9V D-M9WV 80 + 30 (n4) 2 10 + 30 (n2) 2 90 + 30 (n4) 2 85 + 30 (n4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4, 6, 8 )
150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5
Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.
specifications for up to 12 stations.
3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.
115 O S O S Drain Drain (Maintenance space 100 mm or more) M5 x 0.8 IDG10V3, 20V3 IDG10HV3, 20HV3 Total length of the separator OUT 1 I N SMC SMC SMC 2 SMC A C 55 71 Port size 1/4, 3/8 41 Purge air for dew point indicator 7 7 22 41 35 35 14 82 OUT IN 156 129 4 B 14 Purge air for dehumidification Purge air for dehumidification Drain Drain (Maintenance space 100 mm or more) Drain Discharge
J 20 21 24 28 32 G 30.5 32 37.5 44 56 FZ 5 6 6 7 8 FY 19.5 23.5 28 34.5 43.5 FX 22 26.5 31 38 47.5 CB 16 17 20 22 27 CA 8 9 9 12 13.5 EC 8 10 11 15 21.5 EO 12 14 17 23 31.5 DC 28 31 35 43 53.5 DO 32 35 41 51 63.5 B 52 62 70 86 106 NB 8h9 AC 3 3 3 4 5 NA 14 16 18 24 28 AA 44 47 55 66 82 AB 41 44 52 62 77 M 2 2 2 3 4 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0
OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.