Compact Vacuum Unit

New New Compact Vacuum Unit Ejector/Vacuum Pump System RoHS Air consumption: 17% reduced 17% 17% 17% 21% 21% 21% Response time of the valve: 21% increased 5 m ms 5 ms Quick response Energysaving Vacuum pressure reached: 25% 28 ms ms Vacuum response time: 28 ms Compared with existing model (Shortened by 25%; Comparison with other SMC products) 0.88 14.5 Air consumption SCFM (L/min (ANR))

EX120/121/122

21 26.7 26.7 We sell this product individually.

A_HEC-OM-K001

9.8.1 Safety Standards . 9-21 9.8.2 Cautions for Export . 9-21 Chapter 10 Warranty . 10-1 10.1 Scope of warranty and liability to the product . 10-1 TOC-4 A_HEC-OM-K001-1.7 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Be sure to thoroughly read and understand the important precautions defined in this manual before using this product. 1.1 Before using the Chemical Thermo-con

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-21 pc.

Clamp Cylinder with Lock

Applicable Magnetic Field Resistant Auto Switches (Refer to page 21 and 22 for detailed auto switch specifications.)

ITV

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1. Do not use a lubricator on the supply side of this product, as this can cause a malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this regulator. 2.

VDW Series

SOL. 2 () 2 ( ) 21 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Fluid Control Specific Product Precautions 1 Be sure to read before handling. Refer to pages 18 through 21 for safety instructions and precautions for 2/3 port solenoid valve for fluid control.

,,: ,.

Relersn@ torcue soecification TaHe *3 lUL / l0t / lfltt / l0[F $srios [0T/$lt lir 9 9 * Plug-in Elbow: 9. t 7 24.5 -oo Union Elbow: KVL 17.9 18.9 21 21.7 | 22.7 28.9 Female Elbow: KVLF Relernce torque specilication Table #3 IUT / l0T / lflTF $mies [0T/$AElFtiltn Male Branch Tee: KVT Rsfgrencs torque spocifiction Table #3 -oo Union Tee: KVT 11.4 19. 4.4 16.5 2.2 13.2 20.6 1 7 17.9 26.2 21

MU

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

5 Port Air Operated Valve

. 30 20 21 The A and B ports are made on the top.

90

L Dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ZK2 SE2 A 1 No.

0.55

In the case of -X80, VF3240(Pilot valve) will be mounted. 1502 Large Size 3 Port Solenoid Valve Series VP3145/3165/3185 Dimensions VP3165-DZA1-X81 21 Max.10 146.5 113 87.4 21 EXH.1 51 71 EXH.2 95 (Non-locking) Manual override Applicable cable O.D.

Vacuum Unit

Release valve 23 Supply valve 11 Supply valve 21 22 10 stations 24 Release valve 10 stations Release valve 12 23 24 25 13 25 26 (+) () COM. 25 () () COM. 26 (+) (+) Positive common specification Positive common specification () Negative common specification () Negative common specification (*) The valve installed onto the product is non-polar type.

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Air Cylinder Series MB

22 27 32 41 41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Multi-channel Digital Sensor Monitor ( compatible)

CH3 measurement display value 22 CH4 measurement display value 23 Display OFF (No display) : Settable : Not settable (negative acknowledge) -94No.PS-OMW0012-C Value (16 Hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23

CLK1

OUT () Blue [Black] Refer to pages 20 and 21 for magnetic field resistant auto switches. 17 Series CLK1 Auto Switch Specifications Auto Switch Internal Circuits Lead wire colors inside [ ] are those prior to conformity with IEC standards.

ASD

58 31 49.3 6 ASD530F-02-06S 12.8 17 74 25.2 48.3 20.3 8 ASD530F-02-08S 15.2 18.5 76 28.2 51.3 41.9 46.9 48.8 43.8 23 19.8 15.4 R(PT)1/4 19 42.8 37.8 10 ASD530F-02-10S 21 18.5 80 32.6 54.1 23.1 12 ASD530F-02-12S 22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6